Systems and methods for creating crystallographic-orientation controlled poly-silicon films

• US 7,645,337 B2
• Filed: 11/18/2004
• Issued: 01/12/2010
• Est. Priority Date: 11/18/2004
• Status: Expired due to Fees

• Current Assignee: Trustees Of Columbia University In The City Of New York (Columbia University)
• Original Assignee: Trustees Of Columbia University In The City Of New York (Columbia University)
• Inventors: van der Wilt, Paul Christian, Im, James S.
• Primary Examiner(s): Kunemund; Robert M
• Assistant Examiner(s): RAO, G NAGESH
• Application Number:
  US10/994,205
• Publication Number:
  US 20060102901A1
• Time in Patent Office: 1,881 Days
• Field of Search: 117/1, 117/37, 117 43- 46, 117/904, 257/1, 438/1, 438/482, 438/486, 438/487
• US Class Current: 117/43
• CPC Class Codes: C30B 13/22 by irradiation or electric discharge
• CPC Class Codes: C30B 29/605 Products containing multiple oriented crystallites, e.g. columnar crystallites
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02595 polycrystalline
• CPC Class Codes: H01L 21/02609 Crystal orientation
• CPC Class Codes: H01L 21/02672 using crystallisation enhancing elements
• CPC Class Codes: H01L 21/0268 Shape of mask
• CPC Class Codes: H01L 21/02686 Pulsed laser beam
• CPC Class Codes: H01L 21/02691 Scanning of a beam
• CPC Class Codes: H01L 27/1285 using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
• CPC Class Codes: H01L 27/1296 adapted to increase the uniformity of device parameters
• CPC Class Codes: H01L 29/04 characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes characterised by physical imperfections H01L29/30
• CPC Class Codes: Y10S 117/904 Laser beam
• CPC Class Codes: Y10T 117/10 Apparatus
• CPC Class Codes: Y10T 117/1004 with means for measuring, testing, or sensing

Abstract

In accordance with one aspect, the present invention provides a method for providing polycrystalline films having a controlled microstructure as well as a crystallographic texture. The methods provide elongated grains or single-crystal islands of a specified crystallographic orientation. In particular, a method of processing a film on a substrate includes generating a textured film having crystal grains oriented predominantly in one preferred crystallographic orientation; and then generating a microstructure using sequential lateral solidification crystallization that provides a location-controlled growth of the grains orientated in the preferred crystallographic orientation.

Claims

1. A method of processing a semiconductor film on a substrate, the method comprising:

providing a textured semiconductor film comprising crystal grains having a crystallographic orientation predominantly in one direction present below the surface of the semiconductor film and near the interface between the substrate and the semiconductor film; and

generating a microstructure using laser-induced lateral crystallization for providing location-controlled growth of said crystal grains orientated in said crystallographic orientation, wherein the crystallization is initiated within the bulk of the textured semiconductor film near the interface between the substrate and the semiconductor film.

2. The method of claim 1, wherein the microstructure is generated using sequential lateral solidification crystallization comprising:

generating a plurality of laser beam pulses;

directing the plurality of laser beam pulses through a mask to generate a plurality of patterned laser beams;

irradiating a portion of the film with one of the plurality of patterned beams, said beam having an intensity that is sufficient to melt through the entire thickness of the irradiated portion of the film, wherein the irradiated portion of the film laterally crystallizes upon cooling; and

repositioning the film to irradiate a subsequent portion with patterned beams, such that the subsequent portion of the film overlaps with the previously irradiated portion permitting further lateral growth of the crystal grains.

3. The method of claim 1, wherein the microstructure is generated using sequential lateral solidification crystallization comprising:

generating a plurality of laser beam pulses;

directing the plurality of laser beam pulses through a mask to generate a plurality of patterned laser beams;

irradiating a portion of a selected region of the film with one of the plurality of patterned beams, said beam having an intensity that is sufficient to melt the irradiated portion of the film, wherein the irradiated portion of the film crystallizes upon cooling; and

moving the film along a first translation pathway and moving the mask along a second translation pathway while successive portions of the selected region are irradiated with patterned beams, such that the selected region of the film is substantially completely crystallized in a single traversal of the patterned beams over the selected region of the film.

4. The method of claim 2, wherein the mask comprises a dot-patterned mask.

5. The method according to claim 2, wherein the mask includes array patterns which include at least one of dot-shaped areas, hexagonal-shaped areas and rectangular-shaped areas.

6. The method of claim 1, wherein the textured film is generated by one of zone melt recrystallization, solid phase recrystallization, direct deposition methods, surface-energy driven secondary grain growth methods and pulsed laser crystallization methods.

7. The method of claim 6, wherein the direct deposition methods comprise one of chemical vapor deposition, sputtering and evaporation.

8. The method of claim 6, wherein the pulsed laser crystallization methods comprise one of sequential lateral solidification and multiple-pulse ELA processes.

9. The method of claim 1, wherein the film is a semiconductor film.

10. The method of claim 1, wherein the film is a metallic film.

11. The method of claim 1, wherein the one direction is a direction normal to the plane of the film.

12. The method according to claim 11, wherein the film is a silicon film and the predominant crystallographic orientation is a <

111>

orientation.

13. The method according to claim 11, wherein the film is a silicon film and the predominant crystallographic orientation is a <

100>

orientation.

14. The method of claim 5, wherein the mask comprises an array of opaque dot-shaped areas.

15. The method of claim 1, wherein the microstructure is generated using sequential lateral solidification crystallization comprising:

generating a plurality of laser beam pulses;

irradiating a portion of the film with one of the plurality of laser beam pulses, said laser beam pulses having an intensity that is sufficient to melt through the entire thickness of the irradiated portion of the film, wherein the irradiated portion of the film laterally crystallizes upon cooling; and

repositioning the film to irradiate a subsequent portion with patterned beams, such that the subsequent portion of the film overlaps with the previously irradiated portion permitting further lateral growth of the crystal grains.

16. The method of claim 1, wherein said crystallographic orientation is selected such that during location-controlled growth said predominant crystallographic orientation of said crystal grain is maintained.

17. The method of claim 1, wherein said crystallographic orientation is selected such that during location-controlled growth no defects are formed in the microstructure or only defects are formed that do not alter said crystallographic orientation.

18. The method of claim 1, wherein the film is a silicon film, and the one direction is a direction normal to the plane of the film, and further wherein the predominant crystallographic orientation is a <

100>

orientation or a <

111>

orientation.

19. The method of claim 1, wherein laser-induced lateral crystallization is performed for a short distance such that no defects are formed in the microstructure or only defects are formed that do not alter said crystallographic orientation.