Asymmetric membrane cMUT devices and fabrication methods

• US 7,646,133 B2
• Filed: 03/11/2005
• Issued: 01/12/2010
• Est. Priority Date: 02/27/2004
• Status: Active Grant

• Current Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Original Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Inventors: Degertekin, F. Levent
• Primary Examiner(s): Dougherty; Thomas M
• Application Number:
  US11/077,841
• Publication Number:
  US 20050203397A1
• Time in Patent Office: 1,768 Days
• Field of Search: 310/309, 310/322, 310/334, 600/447, 367/140, 327/100
• US Class Current: 310/309
• CPC Class Codes: B06B 1/0292 Electrostatic transducers, e.g. electret-type

Abstract

Asymmetric membrane capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. In a preferred embodiment, a cMUT device according to the present invention generally comprises a membrane having asymmetric properties. The membrane can have a varied width across its length so that its ends have different widths. The asymmetric membrane can have varied flex characteristics due to its varied width dimensions. In another preferred embodiment, a cMUT device according to the present invention generally comprises an electrode element having asymmetric properties. The electrode element can have a varied width across its length so that its ends have different widths. The asymmetric electrode element can have different reception and transmission characteristics due to its varied width dimensions. In another preferred embodiment, a mass load positioned along the membrane can alter the mass distribution of the membrane. Other embodiments are also claimed and described.

Claims

1. A cMUT comprising:

a membrane having a length, a width, and a uniform thickness;

wherein the membrane is asymmetric about a line of bisection across the length of the membrane.

2. The cMUT of claim 1, the membrane further having a first end and a second end, wherein the width of the membrane at the first end is greater than the width of the membrane at the second end, and wherein the distance from the first end to the second end defines the length of the membrane.

3. The cMUT of claim 1, wherein the membrane requires a first collapse force to drive the membrane to a collapse state at a first point proximate the first end and a second collapse force to drive the membrane to a collapse state at a second point proximate the second end, and wherein the first collapse force is lower than the second collapse force.

4. The cMUT of claim 1, further comprising:

an electrode element having a length defined as the distance between a first end and a second end;

wherein the electrode element is asymmetric about a line of bisection across the length of the electrode element.

5. The cMUT of claim 3, further comprising:

an electrode element having a length and a width, the length defined as the distance between a first end and a second end;

wherein the width of the electrode element at the first end is less than the width of the electrode element at the second end.

6. The cMUT of claim 5, wherein the electrode element is adapted to provide the first collapse force and the second collapse force, flexing the membrane at the first point and the second point a substantially equal amount.

7. The cMUT of claim 1, wherein the membrane width varies across the length of the membrane such that the membrane has a plurality of cross sections, wherein each cross section of the plurality of cross sections has a different width, and wherein each cross section of the plurality of cross sections has a different fundamental frequency.

8. The cMUT of claim 2, wherein the length of the membrane is greater than two times the width of the membrane at the first end.

9. The cMUT of claim 1, further comprising an electrode element having a length and a width, the length defined as the distance between a first end and a second end, wherein the width of the electrode element at the first end is less than the width of the electrode element at the second end, and wherein the electrode element is adapted to provide a first collapse force and a second collapse force, flexing the membrane at the first point and the second point a substantially equal amount;

and

wherein the membrane has a vibration mode and wherein the width of the membrane is adapted to alter the vibration mode of the membrane and the flexing characteristics of the membrane.

10. The cMUT of claim 1, wherein the membrane is adapted to transmit and receive ultra-wideband signals.

11. The cMUT of claim 1, wherein the membrane is substantially trapezoidal.

12. A cMUT comprising:

a substrate and a membrane;

one or more mass loads proximate the membrane and configured to modify vibration characteristics of the membrane, the one or more mass loads having a varied width across their length such that mass distribution of the one or more mass loads is non-uniform; and

an electrode disposed within the membrane or on the substrate at a position to maximize reception of an ultrasonic signal for a predetermined vibration mode.

13. The cMUT of claim 12, wherein the one or more mass loads are formed as part of the membrane such that the membrane has a non-uniform mass load across its length and width.

14. The cMUT of claim 12, wherein the one or more mass loads comprises a first mass load and a second mass load set off from each other and located on respective halves of the membrane, the first and second mass loads having a length substantially equal to the membrane and having widths tapered along the lengths of the first and second mass loads.

15. The cMUT of claim 12, wherein the electrode is asymmetric about a line of bisection across the length of the electrode.

16. The cMUT of claim 12, wherein the electrode is configured to transmit and receive ultra-wideband signals.

17. The cMUT of claim 12, wherein the one or more mass loads are positioned relative to the position of the electrode partially based on vibration characteristics of the membrane.

18. The cMUT of claim 12, wherein the one or more mass loads are formed of a malleable non-rigid material.

19. The cMUT of claim 12, the membrane is asymmetric about a line of bisection across its length.

20. The cMUT of claim 12, the membrane has substantially trapezoidal shape.

21. A cMUT comprising:

a membrane that is asymmetric about a line of bisection across the length of the membrane;

one or more mass loads proximate the membrane and configured to modify vibration characteristics of the membrane; and

one or more electrodes disposed within the membrane or on the substrate, the one or more electrodes configured to receive and transmit ultrasonic signals.

22. The cMUT of claim 21, having two mass loads as the one or more mass loads and having a single electrode as the one or more electrodes, wherein the two mass loads are shaped and sized to have a varied widths across their length and arranged in a symmetric arrangement relative to the electrode.

23. The cMUT of claim 21, having a single mass load as the one or more mass loads and having a single electrode as the one or more electrodes, wherein the mass load is shaped and sized to have a varied width across its length and arranged in a symmetric arrangement relative to the electrode.

24. The cMUT of claim 21, wherein the membrane is arranged to have a width that varies inversely relative to the one or more electrodes.

25. The cMUT of claim 21, wherein the one or more electrodes form electrode elements operatively configured to transmit or receive an ultrasonic wave separately from each other.

26. The cMUT of claim 21, wherein the one or more electrodes have varying widths relative to their lengths.