Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby

• US 7,646,471 B2
• Filed: 06/15/2007
• Issued: 01/12/2010
• Est. Priority Date: 01/14/2003
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Teunissen, Paulus Antonius Andreas, Broodbakker, Petrus Johannes Maria, Queens, Rene Marinus Gerardus Johan
• Primary Examiner(s): Kim; Peter B
• Application Number:
  US11/812,165
• Publication Number:
  US 20080036988A1
• Time in Patent Office: 942 Days
• Field of Search: 355/67, 355/53, 355/72, 355/68, 250/492.1, 250/201.2, 359/619, 359/485, 349/124, 356/73, 430/5, 374/130
• US Class Current: 355/55
• CPC Class Codes: G03F 9/7034 Leveling

Abstract

A level sensor for a lithographic projection apparatus according to one embodiment of the invention includes a light source, a first reflector, a second reflector and a detector. The first reflector is positioned to direct light from the light source towards a wafer surface, and the second reflector is positioned to direct light reflected from the wafer surface to the detector. The first and second reflectors are selected to incur a minimal process dependent apparent surface depression.

Claims

1. A plurality of lithographic projection apparatus comprising:

a radiation system configured to provide a projection beam of radiation;

a support structure configured to support a patterning structure, the patterning structure serving to pattern the projection beam according to a desired pattern;

a substrate table configured to hold a substrate; and

a projection system configured to project the patterned beam onto a target portion of the substrate,

wherein each lithographic apparatus includes a level sensor comprising;

a first reflector positioned to direct light from a light source towards a wafer surface; and

a second reflector positioned to direct light reflected from the wafer surface to a detector,

wherein the first reflectors of the level sensors of the plurality of lithographic apparatus are substantially identical to one another,

wherein the second reflectors of the level sensors of the plurality of lithographic apparatus are substantially identical to one another,

wherein the first and the second reflectors are configured to incur a minimal process dependent apparent surface depression.

2. The plurality of lithographic projection apparatus according to claim 1, wherein a process dependent apparent surface depression of one of the plurality of lithographic apparatus is substantially equal to a process dependent apparent surface depression of another of the plurality of lithographic apparatus.

3. The plurality of lithographic projection apparatus according to claim 1, wherein each of the first and second reflectors of the level sensors of the plurality of lithographic apparatus comprises a mirror.

4. The plurality of lithographic apparatus according to claim 3, wherein a reflective surface of the mirror of each of at least one of the first and second reflectors comprises gold.

5. The plurality of lithographic apparatus according to claim 3, wherein a reflective surface of the mirror of each of at least one of the first and second reflectors comprises a dielectric material.

6. The plurality of lithographic projection apparatus according to claim 3, wherein each of said mirrors is metallic, and

wherein a reflective surface of the mirror of each of at least one of the first and second reflectors has a transparent coating.

7. The plurality of lithographic apparatus according to claim 6, wherein a reflective surface of the mirror of each of at least one of the first and second reflectors comprises at least one of silver and aluminum.

8. The plurality of lithographic projection apparatus according to claim 6, wherein said coating comprises at least one of aluminum oxide, magnesium fluoride, and silicon oxide.

9. A lithographic apparatus comprising a level sensor, said level sensor comprising:

a first reflector configured to direct a beam from a light source toward a wafer surface; and

a second reflector configured to direct the beam from the wafer surface to a detector,

wherein a reflective surface of the first reflector has a coating, said coating having an optical thickness of 430 nanometers+/−

60 nanometers at a central wavelength of the beam,

wherein a reflective surface of the second reflector has a coating, said coating having an optical thickness of 430 nanometers+/−

60 nanometers at a central wavelength of the beam,

wherein the first and the second reflectors are configured to incur a minimal process dependent apparent surface depression.

10. The lithographic apparatus according to claim 9, wherein the coating of a reflective surface of at least one of the first and second reflectors comprises aluminum oxide.

11. The lithographic apparatus according to claim 9, wherein the coating of a reflective surface of at least one of the first and second reflectors comprises at least one of aluminum oxide, magnesium fluoride, and silicon oxide.

12. The lithographic apparatus according to claim 9, wherein the coating of a reflective surface of at least one of the first and second reflectors comprises a layer of aluminum oxide having a thickness of 275 nanometers+/−

60 nanometers.

13. The lithographic apparatus according to claim 9, wherein at least one among the first and second reflectors includes a metallic mirror having a transparent coating.

14. A lithographic apparatus comprising a level sensor configured to measure a height of a wafer surface, said level sensor comprising:

a first reflector configured to direct a beam from a light source toward the wafer surface; and

a second reflector configured to direct the beam from the wafer surface to a detector,

wherein a reflective surface of at least one of the first and second reflectors comprises aluminum having a coating of native oxide, and

wherein the first and the second reflectors are configured to incur a minimal process dependent apparent surface depression.

15. The lithographic apparatus according to claim 14, wherein a magnitude of an apparent depression of the wafer surface due to translation of the beam at reflective surfaces of the first and second reflectors is less than thirty-five nanometers.

16. The lithographic apparatus according to claim 14, wherein an error in the height of the wafer surface as indicated by a corresponding position of incidence of the beam at the detector is less than seventy nanometers.

17. The lithographic apparatus according to claim 14, wherein the first reflector includes:

a first surface configured to direct the beam toward the wafer surface; and

a second surface configured to direct the beam toward the first surface.

18. The lithographic apparatus according to claim 14, wherein the second reflector includes:

a first surface configured to direct the beam to the detector; and

a second surface configured to direct the beam toward the first surface.

19. A lithographic apparatus comprising a level sensor, said level sensor comprising:

a first reflector system configured to direct a beam from a light source toward a wafer surface;

and a second reflector system configured to direct the beam from the wafer surface to a detector,

wherein the first reflector system includes a first surface configured to direct the beam toward the wafer surface and a second surface configured to direct the beam toward the first surface, wherein the second reflector system includes a first surface configured to direct the beam to the detector and a second surface configured to direct the beam toward the first surface, and wherein the first and the second reflectors systems are configured to incur a minimal process dependent apparent surface depression.

20. The lithographic apparatus according to claim 19, wherein an apparent surface depression of the first reflector is substantially zero, and

wherein an apparent surface depression of the second reflector is substantially zero.

21. The lithographic apparatus according to claim 19, wherein at least one among the first and second reflectors comprises a prism having the respective first and second surfaces.

22. The lithographic apparatus according to claim 19, wherein said prism comprises a pentaprism.