Deformable mirror device with oscillating states
First Claim
Patent Images
1. A mirror device which deflects incident light, comprising:
- a mirror arranged on a substrate and supported by a hinge;
a first address electrode and a second address electrode disposed on opposite sides across said hinge on said substrate for deflecting the mirror to an ON state, an OFF state, or an oscillating state;
a drive circuit applying a plurality of voltage pulses to the first address electrode and the second electrode for controlling said mirror to continuously oscillate at a specific oscillation frequency in a controlled time period within a display frame period between said first address electrode and second address electrode serving also as a first stopper and a second stopper respectively wherein said mirror further projects a reflection light having an intermediate light intensity in said controlled time period within said display frame period to an image projection lens wherein the intermediate light intensity is a partial portion of a full light intensity reflected from said mirror to said image projection lens when said mirror is operated in the ON state; and
said drive circuit controls the intermediate light intensity by adjusting said oscillation frequency in said controlled time period within said display frame period and said plurality of voltage pulses.
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Abstract
A mirror device which deflects incident light includes: a mirror arranged on a substrate and supported by a hinge; an address electrode deflecting the mirror to an ON state, an OFF state, or an oscillating state; a drive circuit applying a voltage to the address electrode; and a first stopper unit determining an oscillation amplitude in the oscillating state.
21 Citations
21 Claims
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1. A mirror device which deflects incident light, comprising:
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a mirror arranged on a substrate and supported by a hinge; a first address electrode and a second address electrode disposed on opposite sides across said hinge on said substrate for deflecting the mirror to an ON state, an OFF state, or an oscillating state; a drive circuit applying a plurality of voltage pulses to the first address electrode and the second electrode for controlling said mirror to continuously oscillate at a specific oscillation frequency in a controlled time period within a display frame period between said first address electrode and second address electrode serving also as a first stopper and a second stopper respectively wherein said mirror further projects a reflection light having an intermediate light intensity in said controlled time period within said display frame period to an image projection lens wherein the intermediate light intensity is a partial portion of a full light intensity reflected from said mirror to said image projection lens when said mirror is operated in the ON state; and said drive circuit controls the intermediate light intensity by adjusting said oscillation frequency in said controlled time period within said display frame period and said plurality of voltage pulses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A mirror device that deflects incident light, comprising:
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a mirror arranged on a substrate and supported by a hinge; a plurality of address electrodes for deflecting the mirror to an ON state, an OFF state, or an oscillating state or an intermediate state; and a drive circuit for applying a plurality of voltages to the address electrodes for generating different electrostatic forces between the address electrode and said mirror for deflecting said hinge for tilting and continuously oscillating the mirror in a controlled time period within a display frame period to reflect an intermediate amount of light for image display less than a fully-On image display light. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A mirror device that deflects incident light, comprising:
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a mirror arranged on a substrate and supported by a hinge extended from and substantially perpendicular to the substrate; a plurality of address electrodes for deflecting the mirror to an ON state, an OFF state, or an oscillating state or an intermediate state wherein said address electrodes are disposed along at least a first axis and a second axis interconnecting said electrodes; and a drive circuit for applying a voltage to the address electrodes for deflecting said hinge for tilting and oscillating the mirror along at least two different deflection axes depending on angular orientations of said first axis and said second axis.
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Specification