Method and device for multistate interferometric light modulation

• US 7,646,529 B2
• Filed: 02/03/2009
• Issued: 01/12/2010
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Chui, Clarence
• Primary Examiner(s): Sugarman; Scott J
• Assistant Examiner(s): PINKNEY, DAWAYNE
• Application Number:
  US12/365,121
• Publication Number:
  US 20090135466A1
• Time in Patent Office: 343 Days
• Field of Search: 359/295, 359223-225, 359/198, 359290-292, 359/245, 359260-263, 359/298, 359301-303, 359317-318
• US Class Current: 359/295
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G09G 2300/04 Structural and physical details of display devices
• CPC Class Codes: G09G 2310/02 Addressing, scanning or driving the display screen or processing steps related thereto
• CPC Class Codes: G09G 3/3466 based on interferometric effect
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A multi-state light modulator comprises a first reflector 104. A first electrode 142 is positioned at a distance from the first reflector 104. A second reflector 14 is positioned between the first reflector 104 and the first electrode 142. The second reflector 14 is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector 104. In one embodiment, the light modulator has latch electrodes 17 and 143, which hold the light modulator in a driven state. In another embodiment the latch electrodes 17 and 143 are used to alter the actuation and release thresholds of the light modulator.

Claims

1. A light modulator, comprising:

a movable reflector comprising an electrically conductive material, the movable reflector positioned between a first set and a second set of electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first set of electrodes than is the undriven position and wherein the second driven position is farther from the first set of electrodes than is the undriven position;

wherein the first set of electrodes drives the movable reflector to the first driven position;

wherein the second set of electrodes drives the movable reflector to the second driven position; and

further comprising

a third set of electrodes configured to modify at least one of a actuation and a release threshold of the movable reflector; and

a fourth set of electrodes configured to modify at least one of a reverse actuation and a reverse release threshold of the movable reflector.

2. The modulator of claim 1, wherein the modulator substantially absorbs incident visible light when the movable reflector is in the undriven position.

3. The modulator of claim 1, wherein the modulator reflects white light when the movable reflector is in the first driven position.

4. The modulator of claim 1, wherein the modulator selectively reflects light in a range of visible wavelengths associated with a color when the movable reflector is in the second driven position.

5. The modulator of claim 1, wherein the movable reflector remains in the first driven position when the voltage potential is removed from the first set of electrodes.

6. The modulator of claim 1, wherein the movable reflector remains in the second driven position when the voltage potential is removed from the second set of electrodes.

7. The modulator of claim 1, further comprising:

a processor that is in electrical communication with at least one of the first and second electrodes, the processor being configured to process image data; and

a memory device in electrical communication with the processor.

8. The modulator of claim 7, further comprising a driver circuit configured to send at least one signal to at least one of the first, second, third and fourth set of electrodes.

9. The modulator of claim 8, further comprising a controller configured to send at least a portion of the image data to the driver circuit.

10. The modulator of claim 7, further comprising an image source module configured to send the image data to the processor.

11. The modulator of claim 10, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.

12. The modulator of claim 7, further comprising an input device configured to receive input data and to communicate the input data to the processor.

13. The modulator of claim 1 wherein the sets of electrodes comprise one to two electrodes.

14. The modulator of claim 1 wherein the first set of electrodes and the third set of electrodes are both used to drive the movable reflector to the first driven position.

15. The modulator of claim 1 wherein the second set of electrodes and the fourth set of electrodes are both used to drive the movable reflector to the second driven position.

16. A light modulator, comprising:

means for reflecting light positioned between first and second means for positioning the reflecting means, the reflecting means being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first positioning means than is the undriven position and wherein the second driven position is farther from the first positioning means than is the undriven position;

third means for modifying at least one of a actuation and a release threshold of the movable reflector; and

fourth means for modifying at least one of a reverse actuation and a reverse release threshold of the movable reflector.

17. The modulator of claim 16, wherein the reflecting means comprises a movable reflector comprising an electrically conductive material.

18. The modulator of claim 17, wherein the first, second, third, and fourth positioning means each comprise a set of electrodes.

19. The modulator of claim 16 wherein the first means for positioning the reflecting means and the third means for maintaining the reflecting means are both used to drive the reflecting means to the first driven position.

20. The modulator of claim 16 wherein the second means for positioning the reflecting means and the fourth means for maintaining the reflecting means are both used to drive the reflecting means to the second driven position.

21. A method of driving a MEMS device comprising first, second, third, and fourth electrodes, and a movable electrode positioned between the first electrode and the second electrode and configured to move to at least two positions therebetween, the method comprising:

applying a first voltage potential difference between the first electrode and the movable electrode so as to drive the movable electrode to a position substantially in contact with a dielectric layer, wherein a force is created attracting the movable electrode towards the dielectric layer;

applying a second voltage potential difference between the first electrode and the movable electrode and a third voltage potential difference between the second electrode and the movable electrode so as to overcome the force attracting the movable electrode towards the dielectric layer and to drive the movable electrode away from the dielectric layer;

applying a fourth voltage potential difference between the third electrode and the movable electrode; and

applying a fifth voltage potential difference between the fourth electrode and the movable electrode, wherein the force attracting the movable electrode towards the dielectric layer is based at least in part on the fourth and fifth voltages.

22. The method claim 21, wherein the force comprises a stictional force.

23. A method of fabricating a multistate light modulator, the method comprising:

forming first and second electrodes;

forming a movable reflector comprising an electrically conductive material, the movable reflector positioned between the first and second electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first electrode than is the undriven position and wherein the second driven position is farther from the first electrode than is the undriven position;

forming at least one third electrode adjacent to the first electrode; and

forming at least one fourth electrode adjacent to the second elelctrode.

24. The method of claim 23, wherein forming the movable reflector comprises forming a fifth electrode.

25. A light modulator manufactured by the method of claim 23.