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Computer-implemented methods for detecting defects in reticle design data

  • US 7,646,906 B2
  • Filed: 01/31/2005
  • Issued: 01/12/2010
  • Est. Priority Date: 01/29/2004
  • Status: Active Grant
First Claim
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1. A computer-implemented method for detecting defects in reticle design data, comprising:

  • using a computer system to perform steps of;

    generating a first simulated image illustrating how the reticle design data will be printed on a reticle using a reticle manufacturing process;

    generating second simulated images using the first simulated image, wherein the second simulated images illustrate how the reticle will be printed on a wafer at different values of one or more parameters of a wafer printing process; and

    detecting defects in the reticle design data using the second simulated images without fabricating the reticle.

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