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Filled dielectric on metal pressure sensor

  • US 7,647,833 B1
  • Filed: 08/19/2008
  • Issued: 01/19/2010
  • Est. Priority Date: 08/19/2008
  • Status: Active Grant
First Claim
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1. A pressure sensing apparatus comprising:

  • a pressure port having an upper surface and a base portion;

    an elastically deformable pressure-sensitive diaphragm assembly having an upper surface, lower surface and a pressure-sensitive diaphragm;

    said lower surface of said diaphragm assembly being attached onto said upper surface of the pressure port, wherein said diaphragm comprises a metal or metal alloy;

    a functional filled dielectric layer on said diaphragm comprising a base dielectric material and at least one CTE raising filler, a CTE of said functional filled dielectric layer having a CTE @ 800°

    C.≧

    8 ppm/°

    C., anda plurality of piezoresistive elements on said functional filled dielectric dielectric layer.

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