Filled dielectric on metal pressure sensor
First Claim
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1. A pressure sensing apparatus comprising:
- a pressure port having an upper surface and a base portion;
an elastically deformable pressure-sensitive diaphragm assembly having an upper surface, lower surface and a pressure-sensitive diaphragm;
said lower surface of said diaphragm assembly being attached onto said upper surface of the pressure port, wherein said diaphragm comprises a metal or metal alloy;
a functional filled dielectric layer on said diaphragm comprising a base dielectric material and at least one CTE raising filler, a CTE of said functional filled dielectric layer having a CTE @ 800°
C.≧
8 ppm/°
C., anda plurality of piezoresistive elements on said functional filled dielectric dielectric layer.
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Abstract
A pressure sensing apparatus (1) includes an elastically deformable pressure-sensitive diaphragm assembly (13) having a pressure-sensitive metal or metal alloy diaphragm (14). A functional filled dielectric layer (25) is on the diaphragm and includes a base dielectric material and at least one CTE raising filler. A CTE of the functional filled dielectric layer provides a CTE @ 800° C.≧8 ppm/° C., such as ≧10 ppm/° C. A plurality of piezoresistive elements (27) are on the functional filled dielectric layer (25).
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Citations
16 Claims
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1. A pressure sensing apparatus comprising:
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a pressure port having an upper surface and a base portion; an elastically deformable pressure-sensitive diaphragm assembly having an upper surface, lower surface and a pressure-sensitive diaphragm; said lower surface of said diaphragm assembly being attached onto said upper surface of the pressure port, wherein said diaphragm comprises a metal or metal alloy; a functional filled dielectric layer on said diaphragm comprising a base dielectric material and at least one CTE raising filler, a CTE of said functional filled dielectric layer having a CTE @ 800°
C.≧
8 ppm/°
C., anda plurality of piezoresistive elements on said functional filled dielectric dielectric layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for forming a pressure sensing apparatus, comprising:
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bonding a metal or metal alloy comprising diaphragm assembly including diaphragm to a functional filled dielectric layer to form a dielectric surface thereof, said functional filled dielectric layer comprising a base dielectric material and at least one CTE raising filler, a CTE of said functional filled dielectric layer having a CTE @ 800°
C.≧
8 ppm/°
C.;forming a bridge circuit comprising a plurality of piezoelectric elements on said dielectric surface; providing an input pressure port for pressure sensing thereof, wherein said input pressure port is connected to said diaphragm to form said pressure sensing apparatus. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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Specification