×

Sensor having switch function, manufacturing method thereof and electronic device having sensor built therein

  • US 7,649,150 B2
  • Filed: 03/11/2005
  • Issued: 01/19/2010
  • Est. Priority Date: 03/12/2004
  • Status: Expired due to Fees
First Claim
Patent Images

1. A sensor having a switch function manufactured by using a semiconductor integrated circuit technology, comprising:

  • a first substrate made from a semiconductor material on which a conducting part of the switch is formed;

    a second substrate made from a semiconductor material or an insulating material on which a conducting part of the switch is formed; and

    a moving member made from a conducting material;

    whereineither the first or the second substrate has a cavity-shaped portion on a surface of which the conducting part is formed;

    the conducting part of either the first or the second substrate forms a flat surface electrode; and

    the moving member is movably held between the first and the second substrate;

    whereinthe conducting part of the first or the second substrate having the cavity-shaped portion forms;

    a cavity-shaped electrode along a side surface part and a flat surface part of the cavity-shaped portion;

    a side surface electrode and a flat surface electrode on the side surface part and the flat surface part respectively;

    the side surface electrode only;

    orthe flat surface electrode only;

    whereineach of the cavity-shaped electrode, the side surface electrode or the fiat surface electrode contains an electrode extraction part;

    whereinthe electrode extraction part formed on the semiconductor includes a diffusion layer; and

    the conducting part of the first or the second substrate not having the cavity-shaped portion holding the moving member forms;

    the flat surface electrode having an electrode extraction part;

    orthe flat surface electrode only.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×