Analog interferometric modulator device with electrostatic actuation and release

• US 7,649,671 B2
• Filed: 06/01/2006
• Issued: 01/19/2010
• Est. Priority Date: 06/01/2006
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Sampsell, Jeffrey B., Kogut, Lior, Kothari, Manish
• Primary Examiner(s): Sugarman; Scott J
• Assistant Examiner(s): PINKNEY, DAWAYNE
• Application Number:
  US11/444,567
• Publication Number:
  US 20070279729A1
• Time in Patent Office: 1,328 Days
• Field of Search: 359290-292, 359223-225, 359/245, 359260-263, 359/298, 359301-303, 359317-318, 359/237, 359/242, 359/295
• US Class Current: 359/291
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A microelectromechanical system (MEMS) device includes a first electrode, a second electrode electrically insulated from the first electrode, and a third electrode electrically insulated from the first electrode and the second electrode. The MEMS device also includes a support structure which separates the first electrode from the second electrode and a reflective element located and movable between a first position and a second position. The reflective element is in contact with a portion of the device when in the first position and is not in contact with the portion of the device when in the second position. An adhesive force is generated between the reflective element and the portion when the reflective element is in the first position. Voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force.

Claims

1. A microelectromechanical system (MEMS) device comprising:

a first electrode;

a second electrode electrically insulated from the first electrode;

a third electrode electrically insulated from the first electrode and the second electrode;

a support structure which separates the first electrode from the second electrode, the third electrode comprising a conductive portion of the support structure;

an optical stack comprising the first electrode, wherein the optical stack is partially transparent or translucent and at least partially reflective of light; and

a movable reflective element, wherein the optical stack and the reflective element define an interferometric optical cavity between the optical stack and the reflective element, the reflective element movable relative to the optical stack to modulate optical interference of the light by the interferometric optical cavity;

wherein the reflective element is located between a first position and a second position, the reflective element movable between the first position and the second position upon application of a voltage difference between the first electrode and the second electrode, the reflective element in contact with a portion of the optical stack when in the first position and not in contact with the portion of the optical stack when in the second position;

wherein an adhesive force is generated between the reflective element and the portion when the reflective element is in the first position, and wherein voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force.

2. The MEMS device of claim 1, wherein at least a portion of the third electrode is higher than the reflective element when the reflective element is in the first position.

3. The MEMS device of claim 2, wherein at least a portion of the third electrode is directly above at least a portion of the reflective element when the reflective element is in the first position.

4. The MEMS device of claim 1, wherein the third electrode is supported by the support structure.

5. The MEMS device of claim 1, wherein the support structure comprises one or more posts and the third electrode comprises a conductive portion of at least one of the posts.

6. The MEMS device of claim 5, wherein the support structure comprises a plurality of posts, each post having a conductive portion, and the third electrode comprises the conductive portions.

7. The MEMS device of claim 6, wherein the plurality of posts are positioned substantially symmetrically relative to the reflective element.

8. The MEMS device of claim 1, wherein the reflective element comprises a first layer and a second layer over the first layer.

9. The MEMS device of claim 8, wherein the first layer is more flexible than the second layer.

10. The MEMS device of claim 8, wherein the first layer is thinner than the second layer.

11. The MEMS device of claim 8, wherein the second layer covers a central portion of the first layer and does not cover one or more edge portions of the first layer.

12. The MEMS device of claim 8, wherein at least one of the first layer and the second layer is conductive.

13. The MEMS device of claim 1, wherein the reflective element comprises end portions that are thinner than a center portion.

14. The MEMS device of claim 13, wherein at least a portion of the reflective element is conductive.

15. The MEMS device of claim 1, wherein the reflective element comprises one or more extensions above an upper surface of the reflective element and extending toward the second electrode.

16. The MEMS device of claim 15, wherein the one or more extensions are on or near one or more edge portions of the reflective element and have a height above the upper surface of the reflective element that is about ⅓

to about ½

of a thickness of a central portion of the reflective element.

17. The MEMS device of claim 1, wherein the second electrode comprises one or more portions extending toward the reflective element.

18. The MEMS device of claim 1, wherein the third electrode comprises one or more portions extending toward the reflective element.

19. The MEMS device of claim 1, further comprising:

a display;

a processor that is configured to communicate with said display, said processor being configured to process image data; and

a memory device that is configured to communicate with said processor.

20. The MEMS device of claim 19, further comprising a driver circuit configured to send at least one signal to said display.

21. The MEMS device of claim 20, further comprising a controller configured to send at least a portion of said image data to said driver circuit.

22. The MEMS device of claim 19, further comprising an image source module configured to send said image data to said processor.

23. The MEMS device of claim 22 wherein said image source module comprises at least one of a receiver, transceiver, and transmitter.

24. The MEMS device of claim 19, further comprising an input device configured to receive input data and to communicate said input data to said processor.

25. The MEMS device of claim 1, wherein the optical stack comprises an optical layer that is partially transparent or translucent and partially reflective to the light and a dielectric layer that is partially transparent or translucent to the light, the dielectric layer over the optical layer, wherein when the reflective element is in the first position, the dielectric layer comprises the portion of the optical stack in contact with the reflective element.

26. The MEMS device of claim 1, wherein the device has a first reflectivity when the reflective element is in the first position and a second reflectivity when the reflective element is in the second position, the first reflectivity different from the second reflectivity.

27. A microelectromechanical system (MEMS) device comprising:

a first means for conducting electricity;

a second means for conducting electricity, the second conducting means electrically insulated from the first conducting means;

a third means for conducting electricity, the third conducting means electrically insulated from the first conducting means and the second conducting means;

means for separating the first conducting means from the second conducting means, the third conducting means comprising a conductive portion of the separating means;

a first means for reflecting light, wherein the first reflecting means comprises the first conducting means and is partially transparent or translucent and at least partially reflective of light; and

a second means for reflecting light, wherein the first reflecting means and the second reflecting means define an interferometric optical cavity between the first reflecting means and the second reflecting means, the second reflecting means movable relative to the first reflecting means to modulate optical interference of the light by the interferometric optical cavity;

wherein the second reflecting means is located between a first position and a second position, the second reflecting means movable between the first position and the second position upon application of a voltage difference between the first conducting means and the second conducting means, the second reflecting means in contact with a portion of the first reflecting means when in the first position and not in contact with the portion of the first reflecting means when in the second position;

wherein an adhesive force is generated between the second reflecting means and the portion when the second reflecting means is in the first position, and wherein voltages applied to the first conducting means, the second conducting means, and the third conducting means at least partially reduce or counteract the adhesive force while the second reflecting means is in the first position.

28. The MEMS device of claim 27, wherein the first conducting means comprises an electrode.

29. The MEMS device of claim 27, wherein the second conducting means comprises an electrode.

30. The MEMS device of claim 27, wherein the third conducting means comprises an electrode.

31. The MEMS device of claim 30, wherein at least a portion of the electrode is higher than the second reflecting means when the second reflecting means is in the first position.

32. The MEMS device of claim 31, wherein at least a portion of the electrode is directly above at least a portion of the second reflecting means when the second reflecting means is in the first position.

33. The MEMS device of claim 30, wherein the electrode is supported by the separating means.

34. The MEMS device of claim 27, wherein the separating means comprises a mechanical layer and one or more support posts.

35. The MEMS device of claim 27, wherein the second reflecting means comprises a reflective element disposed between the first conducting means and the second conducting means.

36. The MEMS device of claim 27, wherein the first reflecting means comprises an optical layer that is partially transparent or translucent and partially reflective to the light and a dielectric layer that is partially transparent or translucent to the light, the dielectric layer over the optical layer, wherein when the second reflecting means is in the first position, the dielectric layer comprises the portion of the first reflecting means in contact with the second reflecting means.

37. The MEMS device of claim 27, wherein the device has a first reflectivity when the second reflecting means is in the first position and a second reflectivity when the second reflecting means is in the second position, the first reflectivity different from the second reflectivity.

38. A method of operating a microelectromechanical system (MEMS) device, the method comprising:

providing a MEMS device comprising;

a first electrode;

a second electrode electrically insulated from the first electrode;

a third electrode electrically insulated from the first electrode and the second electrode;

a support structure which separates the first electrode from the second electrode, the third electrode comprising a conductive portion of the support structure;

an optical stack comprising the first electrode, wherein the optical stack is partially transparent or translucent and at least partially reflective of light; and

a movable reflective element, wherein the optical stack and the reflective element define an interferometric optical cavity between the optical stack and the reflective element, the reflective element movable relative to the optical stack to modulate optical interference of the light by the interferometric optical cavity;

the reflective element located between a first position and a second position, the reflective element movable between the first position and the second position upon application of a voltage difference between the first electrode and the second electrode, the reflective element in contact with a portion of the optical stack when in the first position and not in contact with the portion of the optical stack when in the second position, wherein an adhesive force is generated between the reflective element and the portion when the reflective element is in the first position;

and

applying voltages to the first electrode, the second electrode, and the third electrode to at least partially reduce or counteract the adhesive force.

39. The method of claim 38, wherein the voltages have magnitudes between about 10 Volts and about 50 Volts.

40. The method of claim 38, wherein the voltages applied to the first, second, and third electrodes causes a portion of the reflective element to undergo an elastic deformation.

41. The method of claim 38, wherein at least one of the voltages applied to the first, second, and third electrodes comprises a time-varying voltage having a frequency.

42. The method of claim 41, wherein the frequency is in a range from about 100 Hz to about 50 MHz.

43. The method of claim 41, wherein the frequency is substantially equal to a mechanical resonant frequency of the reflective element.

44. The method of claim 41, wherein the time-varying voltage causes a portion of the reflective element to undergo an elastic oscillation.

45. The method of claim 44, wherein the frequency is selected to provide an increased amplitude of the elastic oscillation.

46. The method of claim 38, wherein the voltages applied to the first, second, and third electrodes decrease an area of the reflective element in contact with the portion of the optical stack when in the first position by elastically deforming the reflective element.

47. The method of claim 38, wherein at least one of the voltages applied to the first, second, and third electrodes comprises a time-varying voltage which applies an impulse to the reflective element.

48. A method of manufacturing a microelectromechanical system (MEMS) device comprising:

forming a first reflective layer on a substrate;

forming a sacrificial layer over the first reflective layer;

removing a portion of the sacrificial layer to form an opening;

filling the opening with a dielectric material to form a post;

forming a second reflective layer over the sacrificial layer;

removing a portion of the second reflective layer and a portion of the post to form a hole;

filling the hole with a conductive material to form an electrode; and

removing the sacrificial layer.

49. The method of claim 48, wherein the second reflective layer is located and movable between a first position and a second position, the second reflective layer in contact with a portion of the device when in the first position and not in contact with the portion of the device when in the second position, wherein at least a portion of the electrode is higher than the second reflective layer when the second reflective layer is in the first position.

50. The method of claim 49, wherein at least a portion of the electrode is directly above at least a portion of the second reflective layer when the second reflective layer is in the first position.

51. The method of claim 48, wherein the electrode is at least partially supported by the post.