Micromirror device with a single address electrode

• US 7,649,673 B2
• Filed: 02/25/2008
• Issued: 01/19/2010
• Est. Priority Date: 02/26/2007
• Status: Expired due to Fees

• Current Assignee: Olympus Corporation, Silicon Quest Kabushiki-Kaisha
• Original Assignee: Olympus Corporation, Silicon Quest Kabushiki-Kaisha
• Inventors: Nishino, Hirokazu, Maeda, Yoshihiro, Arai, Kazuma, Ishii, Fusao
• Primary Examiner(s): Spector; David N
• Application Number:
  US12/072,451
• Publication Number:
  US 20080218830A1
• Time in Patent Office: 694 Days
• Field of Search: 345/85, 359/290, 359/291, 359/292
• US Class Current: 359/292
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting any each of the mirrors to be deflectable in a plurality of directions, an electrode arranged to face the mirror, and a driving circuit, which is connected to the mirror via the elastic hinge, for applying to the mirror an address voltage for independently controlling the deflection of the mirror.

Claims

1. A micromirror device, comprising:

a plurality of mirrors arranged on a substrate;

an elastic hinge for supporting each of said mirrors to be deflectable in a plurality of directions;

an electrode arranged on the substrate to face said mirror; and

a driving circuit, which is connected to said mirror via said elastic hinge, for supplying to said mirror an address voltage for independently controlling a deflection of said mirror.

2. The micromirror device according to claim 1, wherein

said electrode is arranged on both sides of a deflection axis of said mirror, and has shapes asymmetrical with respect to the deflection axis.

3. The micromirror device according to claim 1, wherein

said electrode is arranged on both sides of a deflection axis of said mirror, and arranged in positions distances of which from the deflection axis are different on both sides of the deflection axis.

4. The micromirror device according to claim 1, wherein

said electrode is a single electrode that is arranged on both side of a deflection axis of said mirror, and electrically connected.

5. The micromirror device according to claim 1, wherein

said electrode is a plurality of independent electrodes arranged on both sides of a deflection axis of said mirror.

6. The micromirror device according to claim 1, wherein

said electrode is provided on any one of the sides of a deflection axis of said mirror.

7. The micromirror device according to claim 1, wherein

the address voltage applied to said mirror is applied to one of the sides of a deflection axis of said mirror.

8. The micromirror device according to claim 1, wherein

the address voltage applied to said mirror is applied to both sides of a deflection axis of said mirror.

9. The micromirror device according to claim 1, wherein

the address voltage applied to said mirror is applied to one of the sides of a deflection axis of said mirror, and also applied to said electrode arranged to face said mirror.

10. The micromirror device according to claim 1, wherein

said elastic hinge supports said mirror in a position offset from a center of said mirror.

11. The micromirror device according to claim 1, wherein

a distance between said mirror and a right region of said electrode, and a distance between said mirror and a left region of said electrode are different with respect to a deflection axis of said mirror.

12. The micromirror device according to claim 1, wherein

a predetermined potential voltage is applied to said electrode while said mirror is being controlled to be deflected.

13. The micromirror device according to claim 1, wherein

said electrode is grounded, or applied with a potential of 0V while said mirror is being controlled to be deflected.

14. The micromirror device according to claim 1, wherein

an address voltage applied to said mirror is a voltage of multiple values.

15. The micromirror device according to claim 1, wherein

the address voltage is applied during a time period corresponding to a weight of image signal data.

16. The micromirror device according to claim 1, wherein

said mirror has a region for preventing a transfer of electrons.

17. A micromirror device, comprising:

a plurality of mirrors arranged on a substrate and an elastic hinge for supporting any each of said mirrors to be deflectable;

an electrode that is arranged on the substrate to face said mirror, and has first and second regions respectively corresponding to first and second electrodes with respect to a deflection axis of said mirror; and

a driving circuit, which is connected to said mirror via said elastic hinge, for applying at least to said mirror an address voltage for independently controlling a deflection of said mirror.

18. The micromirror device according to claim 17, wherein

a coulomb force applied between the first electrode and said mirror, and a coulomb force applied between said second electrode and said mirror are different when said mirror is nearly horizontal to the substrate.

19. The micromirror device according to claim 17, wherein

the first and the second electrodes are electrically connected on or within the substrate.

20. The micromirror device according to claim 17, wherein

the first and the second electrodes have shapes asymmetrical with respect to the deflection axis of said mirror.

21. The micromirror device according to claim 17, wherein

the first and the second electrodes are arranged in positions distances of which from the deflection axis of said mirror are different.

22. The micromirror device according to claim 17, wherein

said elastic hinge supports said mirror in a position offset from a center of said mirror.

23. The micromirror device according to claim 17, wherein

a distance between said mirror and the first electrode, and a distance between said mirror and the second electrode are different.

24. The micromirror device according to claim 17, wherein

said electrode arranged on the substrate is grounded or applied with a predetermined potential as said mirror being controlled to deflected.

25. The micromirror device according to claim 17, wherein

an address voltage is applied to said electrode arranged on the substrate.

26. The micromirror device according to claim 17, wherein

a voltage of a same polarity as the voltage applied to said mirror is applied to the first or the second electrode while a predetermined potential is being applied to said mirror.

27. The micromirror device according to claim 17, wherein

a voltage different from the voltage applied to said mirror is applied to the first or the second electrode while a predetermined potential is being applied to said mirror.

28. The micromirror device according to claim 17, wherein

said mirror has a layer for preventing a transfer of electrons.

29. A micromirror device, comprising:

a plurality of mirrors arranged on a substrate;

at least one address electrode provided for said mirror;

an elastic hinge, which has conductivity, for supporting any each of said mirrors to be deflectable;

an electrode arranged on the substrate to face said mirror; and

a driving circuit, which is connected to said mirror via said elastic hinge, for independently controlling a deflection of said mirror.

30. The micromirror device according to claim 29, wherein said elastic hinge is composed of a plurality of materials.

31. The micromirror device according to claim 29, wherein

said elastic hinge is made of a silicon or a ceramic material doped with an additive for reducing a resistance value of the material.

32. The micromirror device according to claim 29, wherein

a protection layer is provided in a portion where said mirror makes contact with said electrode.

33. The micromirror device according to claim 29, wherein

said mirror has a layer for preventing a transfer of electrons.

34. The micromirror device according to claim 29, wherein

a coulomb force applied between said mirror and said address electrode, and a coulomb force applied between said mirror and said electrode arranged on the substrate differ depending on a deflection direction of said mirror.

35. The micromirror device according to claim 29, wherein

data according to an image data signal is supplied to said driving circuit.

36. The micromirror device according to claim 29, wherein

said electrode arranged on the substrate is grounded.

37. The micromirror device according to claim 29, wherein

outer dimensions of said address electrode are equal or smaller than outer dimensions of said mirror.

38. The micromirror device according to claim 32, wherein

said mirror is shaped like a square or a rhombus one side of which is approximately 4 μ

m to 10 μ

m.

39. A micromirror device, comprising:

a plurality of mirrors arranged on a substrate;

an elastic hinge for supporting any each of said mirrors to be deflectable in a plurality of directions;

an electrode arranged in a position facing said mirror; and

a controlling circuit, which is connected to said mirror via said elastic hinge, for independently controlling a deflection of said mirror, wherein

said controlling circuit independently applies a voltage to each of said mirrors while said mirror is being deflected by a restoring force of said elastic hinge.