Electrostatic chuck assembly

• US 7,649,729 B2
• Filed: 10/12/2007
• Issued: 01/19/2010
• Est. Priority Date: 10/12/2007
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Brillhart, Paul, Buchberger, Douglas A. Jr.
• Primary Examiner(s): Leja; Ronald W
• Application Number:
  US11/871,807
• Publication Number:
  US 20090097184A1
• Time in Patent Office: 830 Days
• Field of Search: 361/234
• US Class Current: 361/234
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/6831 using electrostatic chucks

Abstract

The present invention generally comprises an electrostatic chuck base, an electrostatic chuck assembly, and a puck for the electrostatic chuck assembly. Precisely etching a substrate within a plasma chamber may be a challenge because the plasma within the chamber may cause the temperature across the substrate to be non-uniform. A temperature gradient may exist across the substrate such that the edge of the substrate is at a different temperature compared to the center of the substrate. When the temperature of the substrate is not uniform, features may not be uniformly etched into the various layers of the structure disposed above the substrate. A dual zone electrostatic chuck assembly may compensate for temperature gradients across a substrate surface.

Claims

1. An electrostatic chuck base, comprising:

an electrostatic chuck base body having an inner cooling channel and an outer cooling channel formed within the body, wherein the outer cooling channel is substantially encircling the inner cooling channel, and one or more first grooves are coupled with and extending from the inner cooling channel, and one or more second grooves are coupled with and extending from the outer cooling channel.

2. The electrostatic chuck base of claim 1, wherein the inner cooling channel is arranged in a first pattern and the outer cooling channel is arranged in a second pattern different from the first pattern.

3. The electrostatic chuck base of claim 1, wherein the inner cooling channel winds through the base and turns back upon itself a plurality of times.

4. The electrostatic chuck base of claim 3, wherein the inner cooling channel turns back upon itself about five or more times.

5. The electrostatic chuck base of claim 1, wherein a width of the one or more first grooves is substantially equal to a width of the one or more second grooves.

6. The electrostatic chuck base of claim 1, wherein a height of the one or more first grooves is substantially equal to a height of the one or more second grooves.

7. The electrostatic chuck base of claim 1, wherein at least one groove of the plurality of grooves has a varying width.

8. The electrostatic chuck base of claim 7, wherein the at least one groove having a varying width splits and encircles a lift pin opening.

9. A puck for an electrostatic chuck assembly, comprising:

a puck body; and

a plurality of mesas arranged across the puck body in at least two different patterns, wherein the at least two different patterns comprise at least a first inner pattern in a substantially linear arrangement across a face of the puck and at least a second outer pattern having one or more rows encircling the first inner pattern.

10. The puck of claim 9, wherein the puck body has a first surface adapted to receive a substrate, the first surface having an inner zone and an outer zone encircling the inner zone, wherein

the first inner pattern comprises a first plurality of mesas disposed in a substantially linear arrangement on the first surface in the inner zone and extending above the first surface;

and

the second outer pattern comprising a second plurality of mesas disposed on the first surface in the outer zone and extending above the first surface, the second plurality of mesas arranged in one or more rows encircling the first inner pattern.

11. The puck of claim 10, wherein the inner zone and the outer zone each comprise a heat exchanging gas inlet.

12. An electrostatic chuck assembly, comprising:

a puck, the puck comprising;

a puck body; and

a plurality of mesas arranged across the puck body in at least two different patterns, wherein the at least two different patterns comprise at least a first inner pattern in a substantially linear arrangement across a face of the puck and at least a second outer pattern having one or more rows encircling the first inner pattern; and

an electrostatic chuck base body disposed adjacent the puck, the electrostatic chuck base body having an inner cooling channel and an outer cooling channel formed within the body, wherein the outer cooling channel is substantially encircling the inner cooling channel, and one or more first grooves are coupled with and extending from the inner cooling channel, and one or more second grooves are coupled with and extending from the outer cooling channel.

13. The electrostatic chuck assembly of claim 12, wherein the inner cooling channel is arranged in a first pattern and the outer cooling channel is arranged in a second pattern different from the first pattern.

14. The electrostatic chuck assembly of claim 12, wherein the inner cooling channel winds through the base and turns back upon itself a plurality of times.

15. The electrostatic chuck assembly of claim 14, wherein the inner cooling channel turns back upon itself about five or more times.

16. The electrostatic chuck assembly of claim 12, wherein a width of the one or more first grooves is substantially equal to a width of the one or more second grooves.

17. The electrostatic chuck assembly of claim 12, wherein a height of the one or more first grooves is substantially equal to a height of the one or more second grooves.

18. The electrostatic chuck assembly of claim 12, wherein at least one groove of the plurality of grooves has a varying width.

19. The electrostatic chuck assembly of claim 18, wherein the at least one groove having a varying width splits and encircles a lift pin opening.