Acceleration sensor
First Claim
Patent Images
1. An acceleration sensor comprising:
- a case that includes;
a bottom wall that is made from a predetermined material, the bottom wall having a top side and a bottom side, the top side of the bottom wall having a central region and a peripheral region that surrounds central region;
a projection portion that is attached to the top side of the bottom wall and that is located at the central region of the top side of the bottom wall, the projection portion being made of the predetermined material and having a top surface that is disposed higher than the peripheral region of the top side of the bottom wall; and
a side wall attached to the bottom wall and extending upward from the bottom wall in a height direction;
a semiconductor acceleration sensor chip supported on the projection portion, the sensor chip including;
a fixed portion mounted on the top surface of the projection portion;
a plummet portion surrounding the fixed portion without contacting the fixed portion, the plummet portion being shaped as an approximately square column and having an approximately square cavity for housing the fixed portion, the plummet portion being disposed outward of the projection portion and above the peripheral region of the top side of the bottom wall; and
beam portions extending along diagonals of the cavity of the plummet portion and connecting the fixed portion and the plummet portion, the beam portions having a thickness that is thinner than the thickness of the fixed portion;
terminals outside the case; and
wiring that electrically connects at least some of the terminals to the sensor chip.
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Accused Products
Abstract
An acceleration sensor has a semiconductor acceleration sensor chip and a case. The semiconductor acceleration sensor chip has a fixed portion, a plummet portion surrounding the fixed portion without contacting the fixed portion, and a beam portion connecting the fixed portion and the plummet portion, the thickness of the beam portion being thinner than the thickness of the fixed portion. The case has a cavity housing the semiconductor acceleration sensor chip, and a projection portion formed on the bottom face of the cavity, the bottom face of the fixed portion being fixed to the top face of the projection portion.
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Citations
25 Claims
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1. An acceleration sensor comprising:
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a case that includes; a bottom wall that is made from a predetermined material, the bottom wall having a top side and a bottom side, the top side of the bottom wall having a central region and a peripheral region that surrounds central region; a projection portion that is attached to the top side of the bottom wall and that is located at the central region of the top side of the bottom wall, the projection portion being made of the predetermined material and having a top surface that is disposed higher than the peripheral region of the top side of the bottom wall; and a side wall attached to the bottom wall and extending upward from the bottom wall in a height direction; a semiconductor acceleration sensor chip supported on the projection portion, the sensor chip including; a fixed portion mounted on the top surface of the projection portion; a plummet portion surrounding the fixed portion without contacting the fixed portion, the plummet portion being shaped as an approximately square column and having an approximately square cavity for housing the fixed portion, the plummet portion being disposed outward of the projection portion and above the peripheral region of the top side of the bottom wall; and beam portions extending along diagonals of the cavity of the plummet portion and connecting the fixed portion and the plummet portion, the beam portions having a thickness that is thinner than the thickness of the fixed portion; terminals outside the case; and wiring that electrically connects at least some of the terminals to the sensor chip. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification