Mechanochemical sensor
First Claim
1. A mechanochemical sensor comprising:
- a minute mechanical structure body having a supporting portion and a pair of arms connected via elastic hinges to the support portion;
a functional membrane that is connected to both arms;
a detection means for detecting the change of a mechanical property of the functional membrane, the detection means including a force detection sensor that is connected to one of the arms; and
an actuator for providing tension to the functional membrane, the actuator being connected to the other of the arms.
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Accused Products
Abstract
There is provided a mechanochemical sensor including a minute mechanical structure body having the functional membrane formed at least on one part of its surface, a supporting part for supporting the minute mechanical structure body; and a detection part for detecting the change of a mechanical property of the minute mechanical structure body. According to the invention, it is possible to provide improved adhesion between the functional membrane and the minute mechanical structure body since the functional membrane is integrally formed in advance on the minute mechanical structure body, which will contribute to the increase of detection signal, and improvement of measurement precision and sensitivity.
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Citations
15 Claims
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1. A mechanochemical sensor comprising:
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a minute mechanical structure body having a supporting portion and a pair of arms connected via elastic hinges to the support portion; a functional membrane that is connected to both arms; a detection means for detecting the change of a mechanical property of the functional membrane, the detection means including a force detection sensor that is connected to one of the arms; and an actuator for providing tension to the functional membrane, the actuator being connected to the other of the arms. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification