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Micromechanical device fabrication

  • US 7,651,734 B2
  • Filed: 09/07/2004
  • Issued: 01/26/2010
  • Est. Priority Date: 12/29/2000
  • Status: Active Grant
First Claim
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1. A method of fabricating a micromechanical device, the method comprising:

  • forming at least two micromechanical devices on a common substrate;

    overcoating said micromechanical devices using vapor deposition comprising;

    providing an organic gas;

    generating reactive intermediaries of said organic gas; and

    depositing said reactive intermediaries on said micromechanical devices;

    separating said common substrate to separate said micromechanical devices;

    mounting said micromechanical devices on a package substrate; and

    removing said overcoat from said micromechanical devices.

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