Electromagnetic shield formation for integrated circuit die package
First Claim
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1. A method of packaging a plurality of semiconductor die, the method comprising:
- forming an encapsulated structure including the plurality of semiconductor die, the encapsulated structure including the encapsulating material, the encapsulated structure having a first major surface and a second major surface;
forming a first dielectric layer overlying the first major surface of the encapsulated structure;
forming a plurality of openings in the first dielectric layer;
forming a plurality of conductive structures for electrically coupling to conductive structures of each of the semiconductor die through the plurality of openings;
providing a shielding layer, the second major surface of the encapsulated structure is located between the first major surface of the encapsulated structure and the shielding layer;
forming a first shielding structure for providing electromagnetic shielding for at least one of the plurality of semiconductor die, wherein the forming the first shielding structure includes forming at least one conductive structure, wherein the forming the at least one conductive structure includes;
forming at least one opening in the encapsulated structure, the at least one opening extending at least partially through the encapsulated structure from at least one of the first major surface or the second major surface of the encapsulated structure, andforming conductive material in the at least one opening to form at least one conductive structure, the shielding layer is electrically coupled to the at least one conductive structure.
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Abstract
Electromagnetic shielding for an integrated circuit packaged device. The method includes forming shielding structures by forming openings in an encapsulated structure. The openings are filled with conductive material that surrounds at least one die. The encapsulated structure may include a plurality of integrated circuit die. A layered redistribution structure is formed on one side of the encapsulated structure.
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Citations
20 Claims
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1. A method of packaging a plurality of semiconductor die, the method comprising:
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forming an encapsulated structure including the plurality of semiconductor die, the encapsulated structure including the encapsulating material, the encapsulated structure having a first major surface and a second major surface; forming a first dielectric layer overlying the first major surface of the encapsulated structure; forming a plurality of openings in the first dielectric layer; forming a plurality of conductive structures for electrically coupling to conductive structures of each of the semiconductor die through the plurality of openings; providing a shielding layer, the second major surface of the encapsulated structure is located between the first major surface of the encapsulated structure and the shielding layer; forming a first shielding structure for providing electromagnetic shielding for at least one of the plurality of semiconductor die, wherein the forming the first shielding structure includes forming at least one conductive structure, wherein the forming the at least one conductive structure includes; forming at least one opening in the encapsulated structure, the at least one opening extending at least partially through the encapsulated structure from at least one of the first major surface or the second major surface of the encapsulated structure, and forming conductive material in the at least one opening to form at least one conductive structure, the shielding layer is electrically coupled to the at least one conductive structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification