Capacitance detection circuit including voltage compensation function
First Claim
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1. A capacitance detection circuit for detecting a capacitance change value of a sensor element, the capacitance detection circuit comprising:
- a C-V circuit, connected to the sensor element, for amplifying the capacitance change value of the sensor element by a predetermined gain based on a reference voltage to generate a detection signal; and
a voltage compensation circuit, connected to the C-V circuit, for supplying the reference voltage to the C-V circuit, wherein when the reference voltage fluctuates by a predetermined deviation amount, the voltage compensation circuit reduces the gain relative to the deviation amount;
wherein the C-V circuit includes;
an operational amplifier having a first input terminal connected to the sensor element, a second input terminal connected to the voltage compensation circuit, and an output terminal that outputs the detection signal; and
a feedback capacitor connected between the first input terminal and output terminal of the operational amplifier;
the sensor element includes;
a first variable capacitor having a movable electrode connected to the first input terminal of the operational amplifier and a fixed electrode that receives a first drive signal;
a second variable capacitor having a movable electrode connected to the movable electrode of the first variable capacitor and a fixed electrode that receives a second drive signal; and
a parasitic capacitor element formed in the sensor element and functioning as a parasitic capacitor connected to the first input terminal of the operational amplifier;
wherein the sensor element and feedback capacitor set a first load capacitance applied to the first input terminal of the operational amplifier; and
the voltage compensation circuit includes a plurality of balance capacitors that set a second load capacitance, which is applied to the second input terminal of the operational amplifier, to substantially the same value as the first load capacitance;
wherein the plurality of balance capacitors include;
a first balance capacitor having a first electrode, which is connected to the second input terminal of the operational amplifier, and a second electrode, which receives the first drive signal;
a second balance capacitor having a first electrode, which is connected to the first electrode of the first balance capacitor, and a second electrode, which receives the second drive signal;
a third balance capacitor having a first electrode, which is connected to the second input terminal of the operational amplifier, and a second electrode, which receives the reference voltage; and
a fourth balance capacitor having a first electrode, which is connected to the second input terminal of the operational amplifier, and a second electrode, which is connected to the second electrode of the third balance capacitor.
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Abstract
A capacitance detection circuit that compensates for the fluctuation of a reference voltage with a simple structure. A C-V circuit for a sensor element generates a detection signal by amplifying a capacitance change value of the sensor element by a predetermined gain based on a reference voltage. A voltage compensation circuit, which is connected to the C-V circuit and supplies a reference voltage to the C-V circuit, reduces the gain relative to a deviation amount when the reference voltage fluctuates by a predetermined deviation amount.
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Citations
17 Claims
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1. A capacitance detection circuit for detecting a capacitance change value of a sensor element, the capacitance detection circuit comprising:
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a C-V circuit, connected to the sensor element, for amplifying the capacitance change value of the sensor element by a predetermined gain based on a reference voltage to generate a detection signal; and a voltage compensation circuit, connected to the C-V circuit, for supplying the reference voltage to the C-V circuit, wherein when the reference voltage fluctuates by a predetermined deviation amount, the voltage compensation circuit reduces the gain relative to the deviation amount; wherein the C-V circuit includes; an operational amplifier having a first input terminal connected to the sensor element, a second input terminal connected to the voltage compensation circuit, and an output terminal that outputs the detection signal; and a feedback capacitor connected between the first input terminal and output terminal of the operational amplifier; the sensor element includes; a first variable capacitor having a movable electrode connected to the first input terminal of the operational amplifier and a fixed electrode that receives a first drive signal; a second variable capacitor having a movable electrode connected to the movable electrode of the first variable capacitor and a fixed electrode that receives a second drive signal; and a parasitic capacitor element formed in the sensor element and functioning as a parasitic capacitor connected to the first input terminal of the operational amplifier; wherein the sensor element and feedback capacitor set a first load capacitance applied to the first input terminal of the operational amplifier; and the voltage compensation circuit includes a plurality of balance capacitors that set a second load capacitance, which is applied to the second input terminal of the operational amplifier, to substantially the same value as the first load capacitance; wherein the plurality of balance capacitors include; a first balance capacitor having a first electrode, which is connected to the second input terminal of the operational amplifier, and a second electrode, which receives the first drive signal; a second balance capacitor having a first electrode, which is connected to the first electrode of the first balance capacitor, and a second electrode, which receives the second drive signal; a third balance capacitor having a first electrode, which is connected to the second input terminal of the operational amplifier, and a second electrode, which receives the reference voltage; and a fourth balance capacitor having a first electrode, which is connected to the second input terminal of the operational amplifier, and a second electrode, which is connected to the second electrode of the third balance capacitor. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A capacitance detection circuit for detecting a capacitance change value of a sensor element, the capacitance detection circuit comprising:
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a C-V circuit, connected to the sensor element, for amplifying the capacitance change value of the sensor element by a predetermined gain based on a reference voltage to generate a detection signal; a voltage compensation circuit, connected to the C-V circuit, for supplying the reference voltage to the C-V circuit, wherein when the reference voltage is fluctuated by a certain deviation amount, the voltage compensation circuit reduces the gain relative to the deviation amount; and a voltage divider, connected to the voltage compensation circuit, for dividing the reference voltage by a predetermined ratio and supplying the divided reference voltage to the voltage compensation circuit. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification