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Mirror device

  • US 7,652,813 B2
  • Filed: 07/28/2008
  • Issued: 01/26/2010
  • Est. Priority Date: 08/30/2006
  • Status: Active Grant
First Claim
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1. A mirror device, comprising:

  • an electrode placed on a substrate;

    a protective film formed on the electrode;

    a mirror placed above the electrode; and

    a hinge which is joined to the electrode and is made of a semiconductor material, wherein the electrical resistance of the hinge is lower than that of the protective film.

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