Mirror device
First Claim
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1. A mirror device, comprising:
- an electrode placed on a substrate;
a protective film formed on the electrode;
a mirror placed above the electrode; and
a hinge which is joined to the electrode and is made of a semiconductor material, wherein the electrical resistance of the hinge is lower than that of the protective film.
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Abstract
A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.
28 Citations
10 Claims
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1. A mirror device, comprising:
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an electrode placed on a substrate; a protective film formed on the electrode; a mirror placed above the electrode; and a hinge which is joined to the electrode and is made of a semiconductor material, wherein the electrical resistance of the hinge is lower than that of the protective film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification