Vacuum chuck and suction board

• US 7,654,887 B2
• Filed: 09/25/2006
• Issued: 02/02/2010
• Est. Priority Date: 03/25/2004
• Status: Active Grant

• Current Assignee: Ibiden Co., Ltd.
• Original Assignee: Ibiden Co., Ltd.
• Inventors: Kiriyama, Katsuyuki, Ishikawa, Shigeharu
• Primary Examiner(s): Nguyen; Dung Van
• Application Number:
  US11/525,820
• Publication Number:
  US 20070063453A1
• Time in Patent Office: 1,226 Days
• Field of Search: 451/388, 451/397, 451/398, 451285-289
• US Class Current: 451/388
• CPC Class Codes: B24B 37/30 for single side lapping of plane surfaces
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: Y10T 279/11 Vacuum

Abstract

The vacuum chuck according to the present invention is provided with a sucking plate for sucking and holding an object to be sucked, in which a sucking layer made of a porous ceramic and a dense material layer are integrated, the sucking layer being located on the side for sucking the object to be sucked, wherein the dense material layer is formed by impregnating the porous ceramic with a metal.

Claims

1. A vacuum chuck comprising:

a sucking body comprising a porous ceramic and having a holding surface configured to suck and hold an object; and

a sealing body sealing substantially an entire surface of said sucking body, excluding the holding surface and an air sucking hole corresponding portion of the sucking body,

wherein when the pore distribution in said sucking body is measured in accordance with a mercury injection method, the average pore diameter is 10 to 40 μ

m, the ratio of pores having a pore diameter of 0.7 to 1.2 times of said average pore diameter to the total volume of pores is about 75% or more, the ratio of pores having a pore diameter of less than 0.7 times of said average pore diameter to the total volume of pores is about 15% or less, and the ratio of pores having a pore diameter of more than 1.2 times of said average pore diameter to the total volume of pores is about 10% or less.

4. The vacuum chuck according to any of claims 1 to 3, wherein the porosity of the sucking body is about 20 to about 50%.

2. A vacuum chuck comprising:

a sucking body comprising a porous ceramic and having a holding surface configured to suck and hold an object; and

a sealing layer formed on the sucking body and sealing substantially an entire surface of the sucking body, excluding said holding surface and an air sucking hole corresponding portion of the sucking body,

wherein when the pore distribution in the sucking body is measured in accordance with a mercury injection method, the average pore diameter is 10 to 40 μ

m, the ratio of pores having a pore diameter of 0.7 to 1.2 times of said average pore diameter to the total volume of pores is about 75% or more, the ratio of pores having a pore diameter of less than 0.7 times of said average pore diameter to the total volume of pores is about 15% or less, and the ratio of pores having a pore diameter of more than 1.2 times of the average pore diameter to the total volume of pores is about 10% or less.

3. The vacuum chuck according to claim 2, wherein the sealing layer includes a portion in a neighborhood of the holding surface of the sucking body and the portion of the sealing layer comprises a coating layer formed on a surface of said sucking body.