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Monolithically-pumped erbium-doped waveguide amplifiers and lasers

  • US 7,655,489 B2
  • Filed: 05/19/2008
  • Issued: 02/02/2010
  • Est. Priority Date: 10/19/2005
  • Status: Active Grant
First Claim
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1. A method of doping an oxide, comprising:

  • forming an InAlP oxide host on a substrate by controlling a composition of the oxide;

    broadening a photoluminescence spectral width value by incorporating Erbium into the InAlP oxide via ion implantation to form an Erbium-doped oxide layer; and

    annealing the substrate and the InAlP oxide.

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