Inertial sensor and manufacturing method of the same
First Claim
Patent Images
1. An inertial sensor comprising:
- a cavity portion formed on a substrate;
a weight suspended in the cavity portion via elastically deformable elastic bodies; and
a fixed electrode provided in the cavity portion,wherein a position change of the weight due to an acceleration is detected on the basis of a change of an electrostatic capacitance between the weight and the fixed electrode,the weight is divided into a plurality of divided weights, andeach of the plurality of divided weights is directly connected to an adjacent divided weight by an elastically deformable elastic body such that a portion of a translational component of motion of each divided weight caused by the acceleration is transmitted to the adjacent divided weight.
1 Assignment
0 Petitions
Accused Products
Abstract
A weight of an inertial sensor if formed from a plurality of divided weights, and the divided weights are connected to each other by elastically deformable beams. A movable range and a mass of each of the divided weights and a rigidity of each of the beams are adjusted and a plurality of deformation modes having different sensitivity ranges with respect to the acceleration are used in combination. By this means, it is possible to improve a detecting sensitivity of an acceleration and widen an acceleration response range.
24 Citations
18 Claims
-
1. An inertial sensor comprising:
-
a cavity portion formed on a substrate; a weight suspended in the cavity portion via elastically deformable elastic bodies; and a fixed electrode provided in the cavity portion, wherein a position change of the weight due to an acceleration is detected on the basis of a change of an electrostatic capacitance between the weight and the fixed electrode, the weight is divided into a plurality of divided weights, and each of the plurality of divided weights is directly connected to an adjacent divided weight by an elastically deformable elastic body such that a portion of a translational component of motion of each divided weight caused by the acceleration is transmitted to the adjacent divided weight. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. An inertial sensor comprising:
-
a common fixed electrode; and an inertial mass portion including a plurality of weights supported in a spaced relationship from the common fixed electrode, each weight being directly connected to an adjacent one of the plurality of weights by an elastically deformable elastic body, wherein a position change of the inertial mass portion due to an acceleration is detected by a change in an electrostatic capacitance between the inertial mass portion and the common fixed electrode, and each weight is supported so as to allow both a translational component and a rotational component of motion of that weight in response to the acceleration. - View Dependent Claims (14, 15, 16, 17, 18)
-
Specification