Semiconductor device including a floating gate memory cell with a superlattice channel
First Claim
1. A semiconductor device comprising:
- a semiconductor substrate; and
at least one nonvolatile memory cell comprising a superlattice channel comprising a plurality of stacked groups of layers on said semiconductor substrate, spaced apart source and drain regions for causing transport of charge carriers through said superlattice channel in a parallel direction relative to the stacked groups of layers,each group of layers of said superlattice channel comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon,said energy band-modifying layer comprising at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions, and at least some semiconductor atoms from opposing base semiconductor portions being chemically bound together with the chemical bonds traversing the at least one non-semiconductor monolayer therebetween,a floating gate adjacent said superlattice channel, anda control gate adjacent said floating gate.
5 Assignments
0 Petitions
Accused Products
Abstract
A semiconductor device may include a semiconductor substrate and at least one non-volatile memory cell. The at least one memory cell may include spaced apart source and drain regions, and a superlattice channel including a plurality of stacked groups of layers on the semiconductor substrate between the source and drain regions. Each group of layers of the superlattice channel may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon, which may include at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. A floating gate may be adjacent the superlattice channel, and a control gate may be adjacent the second gate insulating layer.
-
Citations
17 Claims
-
1. A semiconductor device comprising:
-
a semiconductor substrate; and at least one nonvolatile memory cell comprising a superlattice channel comprising a plurality of stacked groups of layers on said semiconductor substrate, spaced apart source and drain regions for causing transport of charge carriers through said superlattice channel in a parallel direction relative to the stacked groups of layers, each group of layers of said superlattice channel comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon, said energy band-modifying layer comprising at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions, and at least some semiconductor atoms from opposing base semiconductor portions being chemically bound together with the chemical bonds traversing the at least one non-semiconductor monolayer therebetween, a floating gate adjacent said superlattice channel, and a control gate adjacent said floating gate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
Specification