Probe card capable of multi-probing
First Claim
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1. A probe card capable of multi-probing, comprising:
- a PCB having a plurality of contact portions disposed on a first surface thereof;
a test module having a plurality of test boards each having at least one probing portion on which a plurality of needles are arrayed, the test board being provided at a side surface with an insertion groove, the plurality of needles in each of the test boards being contacted with the plurality of contact portions of the PCB;
a fixing member for fixing each test board and disposed on the first surface of the PCB; and
an elastic member disposed between the PCB and each of the test boards to bias the test board upward in the vertical direction with respect to the PCB.
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Abstract
A probe card capable of multi-probing includes a print circuit board having a plurality of contact portions and a test module having a plurality of test boards. Each of the test boards includes at least one probing portion on which a plurality of needles are arrayed. The test module selects one of the test boards and probes semiconductor chips formed on a semiconductor wafer through the needles arrayed on the probing portion of the selected test board.
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Citations
12 Claims
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1. A probe card capable of multi-probing, comprising:
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a PCB having a plurality of contact portions disposed on a first surface thereof; a test module having a plurality of test boards each having at least one probing portion on which a plurality of needles are arrayed, the test board being provided at a side surface with an insertion groove, the plurality of needles in each of the test boards being contacted with the plurality of contact portions of the PCB; a fixing member for fixing each test board and disposed on the first surface of the PCB; and an elastic member disposed between the PCB and each of the test boards to bias the test board upward in the vertical direction with respect to the PCB. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification