Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator

• US 7,660,031 B2
• Filed: 02/07/2008
• Issued: 02/09/2010
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Floyd, Philip D.
• Primary Examiner(s): Thompson; Timothy J
• Application Number:
  US12/027,862
• Publication Number:
  US 20080144163A1
• Time in Patent Office: 733 Days
• Field of Search: 359/223, 359/224, 359/290, 359/291
• US Class Current: 359/291
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

By varying the spacing between a partially-reflective, partially-transmissive surface and a highly reflective surface positioned behind the partially-reflective, partially-transmissive surface, an interferometric modulator selectively creates constructive and/or destructive interference between light waves reflecting off the two surfaces. The spacing can be varied by applying a voltage to create electrostatic attraction between the two surfaces, which causes one or both surfaces to deform and move closer together. In the absence of such attraction, the surfaces are in a relaxed position, where they are farther apart from one another. A actuation voltage is needed to create sufficient electrostatic attraction to cause a surface to deform. The actuation voltage can be modified by implanting ions in a dielectric layer attached to one or both surfaces. Upon the application of a voltage, the ions create a baseline level of repulsion or attraction between the two surfaces, which thus require more or less voltage, respectively, to cause a surface to deform. The degree of ion implantation can be chosen to set the actuation voltage as desired, or the surfaces can be made to deform at a given voltage by appropriately selecting the degree of ion implantation.

Claims

1. A method for fabricating an interferometric light modulating device, comprising:

forming a conductive reflective layer;

forming a dielectric layer over the reflective layer;

adding a charged species to the dielectric layer; and

subsequently forming a conductive partly-transmissive and partly-reflective layer over the dielectric layer.

4. The method of claim 1, wherein adding charge comprises directing ions to the dielectric as the dielectric is formed.

5. The method of claim 4, wherein adding the charged species comprises simultaneously sputtering an ion precursor and one or more dielectric precursors.

10. The method of claim 1, wherein forming the reflective layer comprises depositing a layer of chromium and/or indium-tin-oxide.

2. A method for fabricating an interferometric light modulating device, comprising:

forming a conductive reflective layer;

forming a dielectric layer over the reflective layer;

adding a charged species to the dielectric layer, wherein adding the charged species comprises performing an ion implantation after forming the dielectric layer; and

forming a conductive partly-transmissive and partly-reflective layer over the dielectric layer.

3. The method of claim 2, further comprising annealing the dielectric layer after adding the charged species.

6. A method for fabricating an interferometric light modulating device, comprising:

forming a conductive reflective layer;

forming a dielectric layer over the reflective layer;

adding a charged species to the dielectric layer, wherein adding the charged species comprises doping the dielectric layer; and

forming a conductive partly-transmissive and partly-reflective layer over the dielectric layer.

7. The method of claim 6, wherein doping the dielectric layer comprises diffusing dopants into the dielectrtic layer.

8. The method of claim 6, wherein the charge is provided by implanting ions chosen from the group consisting of potassium and phosphorous ions.

9. The method of claim 6, wherein the charge is provided by implanting ions chosen from the group consisting of sodium ions and lithium ions.

11. A method for fabricating an interferometric light modulating device, comprising:

forming a conductive reflective layer;

forming a dielectric layer over the reflective layer, wherein forming the dielectric layer comprises depositing an oxide;

adding a charged species to the dielectric layer; and

forming a conductive partly-transmissive and partly-reflective layer over the dielectric layer.

12. The method of claim 11, wherein the oxide is chosen from the group consisting of aluminum oxide and/or silicon oxide.

13. The method of claim 11, further comprising depositing a layer of a sacrificial material over the dielectric layer and subsequently forming the partly-transmissive and partly-reflective layer.

14. The method of claim 13, wherein forming the partly-transmissive and partly-reflective layer comprises depositing a metallic layer over the sacrificial material.

15. The method of claim 14, further comprising preferentially removing the sacrificial material.