Micromachined artificial haircell
First Claim
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1. A micromachined artificial sensor comprising:
- a support coupled to and movable with respect to a substrate;
a polymer, high-aspect ratio cilia-like structure disposed on and extending out-of-plane from said support;
a strain detector disposed with respect to said support to detect movement of said support;
wherein said support comprises silicon; and
wherein said support is formed by micromachining the substrate to provide a cavity disposed under said support.
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Abstract
A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.
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Citations
17 Claims
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1. A micromachined artificial sensor comprising:
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a support coupled to and movable with respect to a substrate; a polymer, high-aspect ratio cilia-like structure disposed on and extending out-of-plane from said support; a strain detector disposed with respect to said support to detect movement of said support; wherein said support comprises silicon; and wherein said support is formed by micromachining the substrate to provide a cavity disposed under said support. - View Dependent Claims (2, 4, 5, 6, 7, 8, 9, 10)
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3. A micromachined artificial sensor comprising:
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a support coupled to and movable with respect to a substrate; a polymer, high-aspect ratio cilia-like structure disposed on and extending out-of-plane from said support; a strain detector disposed with respect to said support to detect movement of said support; wherein said support comprises a paddle supported by at least two cantilevered beams, and wherein said cilia-like structure is disposed on said paddle.
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11. A micromachined sensing apparatus comprising:
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a silicon substrate; a silicon support coupled to and movable with respect to said substrate, wherein a cavity is defined beneath said support; a polymer, high-aspect ratio cilia-like structure disposed on and extending out-of-plane from said support; a strain detector disposed with respect to said support to detect movement of said support. - View Dependent Claims (12, 13, 14)
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15. A micromachined sensing apparatus comprising:
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a silicon substrate; a silicon support coupled to and movable with respect to said substrate, wherein a cavity is defined beneath said support; a polymer, high-aspect ratio cilia-like structure disposed on and extending out-of-plane from said support; a strain detector disposed with respect to said support to detect movement of said support; further comprising; an additional silicon support coupled to and movable with respect to said substrate, wherein a cavity is defined beneath said additional support; an additional polymer, high-aspect ratio cilia-like structure disposed on and extending out-of-plane from said additional support; an additional strain detector disposed with respect to said additional support to detect movement of said additional support; wherein said additional silicon support is disposed on said substrate at an angle with respect to said silicon support. - View Dependent Claims (16, 17)
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Specification