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Method of manufacturing a hermetic chamber with electrical feedthroughs

  • US 7,662,653 B2
  • Filed: 12/20/2005
  • Issued: 02/16/2010
  • Est. Priority Date: 02/10/2005
  • Status: Active Grant
First Claim
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1. A method of manufacturing a hermetically-sealed chamber with an electrical feedthrough, comprising the steps of:

  • providing a first substrate;

    hermetically fixing an electrode to said first substrate in a predetermined location on said first substrate;

    forming a passage through said first substrate through said predetermined location such that at least a portion of said electrode is exposed to said passage;

    at least partially filling said passage with an electrically conductive material;

    providing a second substrate;

    mutually imposing said first and second substrates to define a chamber such that said electrode is disposed within said chamber; and

    cutting said first and second substrates with a laser so as to fuse said first and second substrates together to form a unitary housing and to hermetically seal said chamber.

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