×

Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement

  • US 7,663,097 B2
  • Filed: 04/25/2007
  • Issued: 02/16/2010
  • Est. Priority Date: 08/11/2004
  • Status: Active Grant
First Claim
Patent Images

1. A method of calibrating a reflectometer, comprising:

  • providing two or more calibration samples, wherein the reflectance properties of the calibration samples differ from one another;

    collecting a set of measured data from each of the calibration samples; and

    utilizing a combination of the measured data that is independent of the source intensity, I0, to determine a property of at least one of the calibration samples so that reflectance data from an unknown sample may be calibrated;

    wherein one or more of the calibration samples have one or more contaminant layers, andwherein one or more properties of the contaminant layers are determined through analysis of the combination of the measured data.

View all claims
  • 5 Assignments
Timeline View
Assignment View
    ×
    ×