Method of fabricating light emitting device and thus-fabricated light emitting device
First Claim
1. A light emitting device comprising:
- a light emitting layer section based on a double heterostructure in which a first-conductivity-type cladding layer, an active layer and a second-conductivity-type cladding layer, each of which being composed of a compound semiconductor having a composition allowing lattice matching with GaAs, out of compound semiconductors expressed by formula (AlxGa1-x)yIn1-yP (where, 0≦
x≦
1, 0≦
y≦
1), stacked in this order, and having a (100) surface appear on a main surface thereof; and
a GaP transparent semiconductor layer stacked on said light emitting layer section as being agreed with a crystal orientation thereof, being formed by dicing so that {100} surfaces appear on side faces of said GaP transparent semiconductor layer as the side faces of the device, wherein;
said GaP transparent semiconductor layer has surface roughening projections formed on the side faces thereof by anisotropic etching operatively resulting in said light emitting device comprising surface roughening projections that are rounded and that have curved surfaces on an end portion side of the surface projections, and wherein each of said surface roughening projections has a main body composing the projection base and is thinned towards the end portion side thereof and has a swelled tip portion integrated with said main body, as being swelled out in a ball form on the end portion side thereof, wherein the tip swelled out in a ball form and the main body composing the projection base are of the same material.
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Accused Products
Abstract
A light emitting device chip is obtained by dicing a light emitting device wafer having a light emitting layer section 24 based on a double heterostructure in which a first-conductivity-type cladding layer 6, an active layer 5 and an second-conductivity-type cladding layer 4, each of which being composed of a compound semiconductor having a composition allowing lattice matching with GaAs, out of compound semiconductors expressed by formula (AlxGa1-x)yIn1-yP (where, 0≦x≦1, 0≦y≦1), are stacked in this order, and having the (100) surface appeared on the main surface thereof, and GaP transparent semiconductor layers 20, 90 stacked on the light emitting layer section 24 as being agreed with the crystal orientation thereof, so that the {100} surfaces appear on the side faces of the GaP transparent semiconductor layer. Accordingly, there can be provided a method of fabricating a light emitting device having the AlGaInP light emitting layer section and the GaP transparent semiconductor layers, less causative of failures such as edge chipping during the dicing.
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Citations
5 Claims
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1. A light emitting device comprising:
-
a light emitting layer section based on a double heterostructure in which a first-conductivity-type cladding layer, an active layer and a second-conductivity-type cladding layer, each of which being composed of a compound semiconductor having a composition allowing lattice matching with GaAs, out of compound semiconductors expressed by formula (AlxGa1-x)yIn1-yP (where, 0≦
x≦
1, 0≦
y≦
1), stacked in this order, and having a (100) surface appear on a main surface thereof; anda GaP transparent semiconductor layer stacked on said light emitting layer section as being agreed with a crystal orientation thereof, being formed by dicing so that {100} surfaces appear on side faces of said GaP transparent semiconductor layer as the side faces of the device, wherein; said GaP transparent semiconductor layer has surface roughening projections formed on the side faces thereof by anisotropic etching operatively resulting in said light emitting device comprising surface roughening projections that are rounded and that have curved surfaces on an end portion side of the surface projections, and wherein each of said surface roughening projections has a main body composing the projection base and is thinned towards the end portion side thereof and has a swelled tip portion integrated with said main body, as being swelled out in a ball form on the end portion side thereof, wherein the tip swelled out in a ball form and the main body composing the projection base are of the same material. - View Dependent Claims (2, 3, 4, 5)
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Specification