Method of fabricating light emitting device and thus-fabricated light emitting device

• US 7,663,151 B2
• Filed: 04/13/2005
• Issued: 02/16/2010
• Est. Priority Date: 04/27/2004
• Status: Expired due to Fees

• Current Assignee: Shin-Etsu Handotai Co., Ltd. (Shin-Etsu Chemical Company Limited)
• Original Assignee: Shin-Etsu Handotai Co., Ltd. (Shin-Etsu Chemical Company Limited)
• Inventors: Suzuki, Kingo, Ikeda, Hitoshi, Nakamura, Akio
• Primary Examiner(s): Fahmy; Wael
• Assistant Examiner(s): SAYADIAN, HRAYR
• Application Number:
  US11/587,632
• Publication Number:
  US 20070224714A1
• Time in Patent Office: 1,770 Days
• Field of Search: 257/95, 257/97, 257/E33.074, 438/22, 438/33, 438/46, 438/47
• US Class Current: 257/95
• CPC Class Codes: H01L 33/0093 Wafer bonding; Removal of the growth substrate
• CPC Class Codes: H01L 33/0095 Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
• CPC Class Codes: H01L 33/22 Roughened surfaces, e.g. at the interface between epitaxial layers
• CPC Class Codes: H01L 33/30 containing only elements of Group III and Group V of the Periodic Table

Abstract

A light emitting device chip is obtained by dicing a light emitting device wafer having a light emitting layer section 24 based on a double heterostructure in which a first-conductivity-type cladding layer 6, an active layer 5 and an second-conductivity-type cladding layer 4, each of which being composed of a compound semiconductor having a composition allowing lattice matching with GaAs, out of compound semiconductors expressed by formula (Al_xGa_1-x)_yIn_1-yP (where, 0≦x≦1, 0≦y≦1), are stacked in this order, and having the (100) surface appeared on the main surface thereof, and GaP transparent semiconductor layers 20, 90 stacked on the light emitting layer section 24 as being agreed with the crystal orientation thereof, so that the {100} surfaces appear on the side faces of the GaP transparent semiconductor layer. Accordingly, there can be provided a method of fabricating a light emitting device having the AlGaInP light emitting layer section and the GaP transparent semiconductor layers, less causative of failures such as edge chipping during the dicing.

Claims

1. A light emitting device comprising:

a light emitting layer section based on a double heterostructure in which a first-conductivity-type cladding layer, an active layer and a second-conductivity-type cladding layer, each of which being composed of a compound semiconductor having a composition allowing lattice matching with GaAs, out of compound semiconductors expressed by formula (Al_xGa_1-x)_yIn_1-yP (where, 0≦

x≦

1, 0≦

y≦

1), stacked in this order, and having a (100) surface appear on a main surface thereof; and

a GaP transparent semiconductor layer stacked on said light emitting layer section as being agreed with a crystal orientation thereof, being formed by dicing so that {100} surfaces appear on side faces of said GaP transparent semiconductor layer as the side faces of the device, wherein;

said GaP transparent semiconductor layer has surface roughening projections formed on the side faces thereof by anisotropic etching operatively resulting in said light emitting device comprising surface roughening projections that are rounded and that have curved surfaces on an end portion side of the surface projections, and wherein each of said surface roughening projections has a main body composing the projection base and is thinned towards the end portion side thereof and has a swelled tip portion integrated with said main body, as being swelled out in a ball form on the end portion side thereof, wherein the tip swelled out in a ball form and the main body composing the projection base are of the same material.

2. The light emitting device as claimed in claim 1, wherein said light emitting layer section is obtained as being epitaxially grown on a GaAs substrate having a principal crystal axis with an off-angle of 1°

to 25°

, both ends inclusive, away from a <

100>

direction, and a crystal orientation of said GaP transparent semiconductor layer is agreed with said off-angled light emitting layer section.

3. The light emitting device as claimed in claim 1, wherein said GaP transparent semiconductor layer is formed as a GaP light extraction layer formed on the first main surface side, which falls on a light extraction side, of said light emitting layer section.

4. The light emitting device as claimed in claim 1, wherein said GaP transparent semiconductor layer is formed as a GaP transparent substrate layer formed on a second main surface side, which falls on an opposite side of a light extraction side, of said light emitting layer section.

5. The light emitting device as claimed in claim 1, wherein a plurality of said surface roughening projections formed as being distributed on said side faces show a polyhedral form having a plurality of planes surrounding an outer surface of at least projection bases, and a majority of said projections are formed as having both of Φ

1 and Φ

2 of 30°

or more, satisfying Φ

1Φ

2, where Φ

1 and Φ

2 are acute angles respectively held between each of two opposing surfaces of a same projection and a first main surface of said GaP transparent semiconductor layer in a predetermined direction on said side faces.