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Method and system for measuring physical parameters with a piezoelectric bimorph cantilever in a gaseous or liquid environment

  • US 7,663,295 B2
  • Filed: 12/14/2006
  • Issued: 02/16/2010
  • Est. Priority Date: 12/15/2005
  • Status: Expired due to Fees
First Claim
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1. A sensor for measuring at least two physical parameters in an environment comprising at least one of a gas and a liquid, comprising:

  • a piezoelectric bimorph cantilever comprising at least a first layer, a piezoelectric layer, and two electrodes;

    a support on which the piezoelectric bimorph cantilever is mounted;

    electrical connections to the electrodes of the piezoelectric bimorph cantilever;

    means for vibrating the piezoelectric bimorph cantilever with the electrodes;

    means for measuring an output signal of the electrodes;

    means for determining the resonant frequencies of at least two resonance modes based on the output signal of the electrodes; and

    means for determining at least two physical parameters of the environment, each based on a combination of the resonant frequencies.

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