Light emitting device and method of manufacturing the same

• US 7,663,305 B2
• Filed: 06/24/2003
• Issued: 02/16/2010
• Est. Priority Date: 06/27/2002
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Noda, Takeshi, Yamazaki, Shunpei
• Primary Examiner(s): Patel; Nimeshkumar D.
• Assistant Examiner(s): Perry; Anthony T
• Application Number:
  US10/602,980
• Publication Number:
  US 20050073243A1
• Time in Patent Office: 2,429 Days
• Field of Search: 313/506
• US Class Current: 313/506
• CPC Class Codes: H10K 50/818 Reflective anodes, e.g. ITO combined with thick metallic layers
• CPC Class Codes: H10K 50/824 combined with auxiliary electrodes
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 50/865 comprising light absorbing layers, e.g. light-blocking layers
• CPC Class Codes: H10K 59/122 Pixel-defining structures or layers, e.g. banks
• CPC Class Codes: H10K 59/126 Shielding, e.g. light-blocking means over the TFTs
• CPC Class Codes: H10K 59/80522 combined with auxiliary electrodes
• CPC Class Codes: H10K 59/8792 comprising light absorbing layers, e.g. black layers
• CPC Class Codes: H10K 71/135 using ink-jet printing

Abstract

In a top emission structure, there has been a problem in that a wiring, a TFT, or the like is provided in regions other than a light emitting region so that light reflected by the wiring reaches eyes of an observer. The present invention prevents light that is reflected by a wire from reaching eyes of an observer by providing a light-absorbing multilayer film (61) in regions other than a light emitting region. Specifically, the light-absorbing multilayer film (61) is used as an upper layer of a partition wall (also called as a bank or a barrier) that covers ends of a first electrode (66b) whereas an organic resin film (67) is used as a lower layer of the partition wall. The partition wall in the present invention is characterized by being a laminate of three or more layers formed of different materials.

Claims

1. A light emitting device comprising:

a substrate having an insulating surface;

a thin film transistor formed over the substrate;

an insulating film formed over the thin film transistor;

a first electrode formed over the insulating film and connected to the thin film transistor through the insulating film;

a partition wall covering an edge of the first electrode and formed over the insulating film;

a layer comprising an organic compound formed over and in contact with the first electrode; and

a second electrode in contact with the layer comprising an organic compound,

wherein the partition wall comprises a laminate of an organic resin layer and a light-absorbing layer including at least a reflective metal film, a first light transmissive insulating film comprising nitride, a metal nitride film and, a second light-transmissive insulating film comprising nitride,

wherein the organic resin layer comprises a top surface and a side surface, the side surface being tapered,

wherein the light absorbing layer entirely covers the top surface of the organic resin layer, and

wherein the layer comprising an organic compound is in contact with the side surface of the organic resin layer.

2. A light emitting device according to claim 1, wherein the partition wall covers other regions than a light emitting region in which the first electrode and the layer comprising an organic compound are in contact with each other.

3. A light emitting device according to claim 1, wherein the light-absorbing layer comprises at least a layer comprising a material selected from the group consisting of Al₂O₃, SiO₂, ZrO₂, HfO₂, Sc₂O₃, TiO₂, ITO and ZnO.

4. A light emitting device according to claim 1, wherein the light-absorbing layer includes at least a layer comprising a material selected from the group consisting of Al, Cu, Au, Mo, Ni, Pt, Rh, Ag, W, Cr, Co, Si, Zr, Ta, Inconel and Nichrome.

5. A light emitting device according to claim 1, wherein the light-absorbing layer comprises a laminate of a metal film mainly composed of aluminum, a silicon nitride film, a titanium nitride film, and another silicon nitride film as the reflective metal film, the first light transmissive insulating film comprising nitride, the metal nitride film, and the second light-transmissive insulating film comprising nitride.

6. A light emitting device according to claim 1, wherein the second electrode is a conductive film transmissive of light.

7. A light emitting device according to claim 1, wherein the first electrode has a concave shape and is formed in a self-aligning manner using the partition wall as a mask.

8. A light emitting device according to claim 1, wherein the first electrode is an anode and the second electrode is a cathode.

9. A light emitting device according to claim 1, wherein the first electrode is a cathode and the second electrode is an anode.

10. A light emitting device according to claim 1, wherein the layer comprising an organic compound is made of a material emitting red light, green light, or blue light.

11. A light emitting device according to claim 1, wherein the layer comprising an organic compound comprises a material emitting white light, and is combined with a color filter provided in a sealing member.

12. A light emitting device according to claim 1, wherein the layer comprising an organic compound comprises a material emitting monochromatic light, and is combined with one of a color conversion layer and a colored layer provided in a sealing member.

13. A light emitting device according to claim 1, wherein the light emitting device is any one of a video camera, a digital camera, a goggle-type display, a car navigation system, a personal computer, a DVL) player, an electronic game machine, and a portable information terminal.

14. A light emitting device according to claim 1, wherein the first electrode comprises at least two layers.

15. A light emitting device comprising:

a substrate having an insulating surface;

a thin film transistor formed over the substrate;

an insulating film formed over the thin film transistor;

a first electrode formed over the insulating film and connected to the thin film transistor through the insulating film;

a partition wall covering an edge of the first electrode and formed over the insulating film;

a layer comprising an organic compound formed over and in contact with the first electrode; and

a second electrode in contact with the layer comprising an organic compound,

wherein the partition wall comprises a laminate of an organic resin layer and a light-absorbing multilayer film including at least a reflective metal film, a first light transmissive insulating film comprising nitride, a metal nitride film, and a second light-transmissive insulating film comprising nitride,

wherein the organic resin layer comprises a top surface and a side surface, the side surface being tapered,

wherein the light absorbing multilayer film entirely covers the top surface of the organic resin layer, and

wherein the layer comprising an organic compound is in contact with the side surface of the organic resin layer.

16. A light emitting device according to claim 15, wherein the partition wall covers other regions than a light emitting region in which the first electrode and the layer comprising an organic compound are in contact with each other.

17. A light emitting device according to claim 15, wherein the light-absorbing multilayer film comprises at least a layer comprising a material selected from the group consisting of Al₂O₃, SiO₂, ZrO₂, HfO₂, Sc₂O₃, TiO₂, ITO and ZnO.

18. A light emitting device according to claim 15, wherein the light-absorbing multilayer film comprises at least a layer comprising a material selected from the group consisting of Al, Cu, Au, Mo, Ni, Pt, Rh, Ag, W, Cr, Co, Si, Zr, Ta, Inconel and Nichrome.

19. A light emitting device according to claim 15, wherein the light-absorbing multilayer film comprises a laminate of a metal film mainly composed of aluminum, a silicon nitride film, a titanium nitride film, and another silicon nitride film, stacked in this order as the reflective metal film, the first light transmissive insulating film comprising nitride, the metal nitride film, and the second light-transmissive insulating film comprising nitride.

20. A light emitting device according to claim 15, wherein the second electrode is a conductive film transmissive of light.

21. A light emitting device according to claim 15, wherein the first electrode has a concave shape and is formed in a self-aligning manner using the partition wall as a mask.

22. A light emitting device according to claim 15, wherein the first electrode is an anode and the second electrode is a cathode.

23. A light emitting device according to claim 15, wherein the first electrode is a cathode and the second electrode is an anode.

24. A light emitting device according to claim 15, wherein the layer comprising an organic compound is made of a material emitting red light, green light, or blue light.

25. A light emitting device according to claim 15, wherein the layer comprising an organic compound comprises a material emitting white light, and is combined with a color filter provided in a sealing member.

26. A light emitting device according to claim 15, wherein the layer comprising an organic compound comprises a material emitting monochromatic light, and is combined with one of a color conversion layer and a colored layer provided in a sealing member.

27. A light emitting device according to claim 15, wherein the light emitting device is any one of a video camera, a digital camera, a goggle-type display, a car navigation system, a personal computer, a DVD player, an electronic game machine, and a portable information terminal.

28. A light emitting device according to claim 15, wherein the first electrode comprises at least two layers.

29. A light emitting device comprising:

a first electrode connected to a thin film transistor over a substrate having an insulating surface;

a partition wall covering an edge of the first electrode;

a layer comprising an organic compound in contact with the first electrode; and

a second electrode in contact with the layer comprising an organic compound,

wherein the partition wall comprises a laminate of an organic resin layer and a light-absorbing multilayer film including a reflective metal film, a first light transmissive insulating film comprising nitride, a metal nitride film, and a second light-transmissive insulating film comprising nitride.

30. A light emitting device according to claim 29, wherein the partition wall covers other regions than a light emitting region in which the first electrode and the layer comprising an organic compound are in contact with each other.

31. A light emitting device according to claim 29, wherein the light-absorbing multilayer film includes at least one layer comprising a material selected from the group consisting of Al₂O₃, SiO₂, ZrO₂, HfO₂, Sc₂O₃, TiO₂, ITO and ZnO.

32. A light emitting device according to claim 29, wherein the light-absorbing multilayer film includes at least a layer comprising a material selected from the group consisting of Al, Cu, Au, Mo, Ni, Pt, Rb, Ag, W, Cr, Co, Si, Zr, Ta, Inconel and Nichrome.

33. A light emitting device according to claim 29, wherein the reflective metal film is mainly composed of aluminum.

34. A light emitting device according to claim 29, wherein at least one of the first and second light transmissive insulating films is a silicon nitride film.

35. A light emitting device according to claim 29, wherein the metal nitride film is a titanium nitride film.

36. A light emitting device according to claim 29, wherein the second electrode is a conductive film transmissive of light.

37. A light emitting device according to claim 29, wherein the first electrode has a concave shape and is formed in a self-aligning manner using the partition wall as a mask.

38. A light emitting device according to claim 29, wherein the first electrode is an anode and the second electrode is a cathode.

39. A light emitting device according to claim 29, wherein the first electrode is a cathode and the second electrode is an anode.

40. A light emitting device according to claim 29, wherein the layer comprising an organic compound is made of a material emitting red light, green light, or blue light.

41. A light emitting device according to claim 29, wherein the layer comprising an organic compound comprises a material emitting white light, and is combined with a color filter provided in a sealing member.

42. A light emitting device according to claim 29, wherein the layer comprising an organic compound comprises a material emitting monochromatic light, and is combined with one of a color conversion layer and a colored layer provided in a sealing member.

43. A light emitting device according to claim 29, wherein the light emitting device is any one of a video camera, a digital camera, a goggle-type display, a car navigation system, a personal computer, a DVD player, an electronic game machine, and a portable information terminal.

44. A light emitting device according to claim 29, wherein the first electrode comprises at least two layers.

45. A light emitting device comprising:

a substrate having an insulating surface;

a thin film transistor formed over the substrate;

an insulating film formed over the thin film transistor;

a first electrode formed over and in contact with the insulating film and connected to the thin film transistor though the insulating film;

a partition wall covering an edge of the first electrode and formed over the insulating film;

a layer comprising an organic compound formed over and in contact with the first electrode; and

a second electrode in contact with the layer comprising an organic compound,

wherein the partition wall comprises a laminate of an organic resin layer and a light-absorbing multilayer film including at least a reflective metal film, a first light transmissive insulating film comprising nitride, a metal nitride film, and a second light-transmissive insulating film comprising nitride,

wherein the organic resin layer comprises a top surface and a side surface, the side surface being tapered,

wherein the light absorbing multilayer film entirely covers the top surface of the organic resin layer, and

wherein the layer comprising an organic compound is in contact with the side surface of the organic resin layer.

46. A light emitting device according to claim 45, wherein the partition wall covers other regions than a light emitting region in which the first electrode and the layer comprising an organic compound are in contact with each other.

47. A light emitting device according to claim 45, wherein the light-absorbing multilayer film comprises at least a layer comprising a material selected from the group consisting of Al₂O₃, SiO₂, ZrO₂, HfO₂, Sc₂O₃, TiO₂, ITO and ZnO.

48. A light emitting device according to claim 45, wherein the light-absorbing multilayer film includes at least a layer comprising a material selected from the group consisting of Al, Cu, Au, Mo, Ni, Pt, Rh, Ag, W, Cr, Co, Si, Zr, Ta, Inconel and Nichrome.

49. A light emitting device according to claim 45, wherein the light-absorbing multilayer film comprises a laminate of a metal film mainly composed of aluminum, a silicon nitride film, a titanium nitride film, and another silicon nitride film as the reflective metal film, the first light transmissive insulating film comprising nitride, the metal nitride film, and the second light-transmissive insulating film comprising nitride.

50. A light emitting device according to claim 45, wherein the second electrode is a conductive film transmissive of light.

51. A light emitting device according to claim 45, wherein the first electrode has a concave shape and is formed in a self aligning manner using the partition wall as a mask.

52. A light emitting device according to claim 45, wherein the first electrode is an anode and the second electrode is a cathode.

53. A light emitting device according to claim 45, wherein the first electrode is a cathode and the second electrode is an anode.

54. A light emitting device according to claim 45, wherein the layer comprising an organic compound is made of a material emitting red light, green light, or blue light.

55. A light emitting device according to claim 45, wherein the layer comprising an organic compound comprises a material emitting white light, and is combined with a color filter provided in a sealing member.

56. A light emitting device according to claim 45, wherein the layer comprising an organic compound comprises a material emitting monochromatic light, and is combined with one of a color conversion layer and a colored layer provided in a sealing member.

57. A light emitting device according to claim 45, wherein the light emitting device is any one of a video camera, a digital camera, a goggle-type display, a car navigation system, a personal computer, a DVD player, an electronic game machine, and a portable information terminal.

58. A light emitting device according to claim 45, wherein the first electrode comprises at least two layers.