Liquid handling system with electronic information storage

• US 7,664,568 B2
• Filed: 03/08/2005
• Issued: 02/16/2010
• Est. Priority Date: 06/13/2001
• Status: Expired due to Term

• Current Assignee: Entegris Incorporated
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Andrews, Robert, O'Dougherty, Kevin T.
• Primary Examiner(s): SHAPIRO, JEFFREY ALAN
• Application Number:
  US11/074,408
• Publication Number:
  US 20050177274A1
• Time in Patent Office: 1,806 Days
• Field of Search: 700/105, 700/110, 700/230, 700/231, 700/239, 700/244, 700265-273, 700281-285, 738/665, 174/47, 137/177, 137/251.1, 137/798, 455/66, 324/637, 324/639, 324/663, 705 45- 55, 340/618, 340/620, 3405721-5729
• US Class Current: 700/231
• CPC Class Codes: B67D 7/0283 specially adapted for transferring liquids of high purity
• CPC Class Codes: B67D 7/348 by interrogating an information transmitter, e.g. a transponder B67D7/145 takes precedence
• CPC Class Codes: G05D 7/0617 specially adapted for fluid materials
• CPC Class Codes: Y10T 137/0318 Processes
• CPC Class Codes: Y10T 137/8158 With indicator, register, recorder, alarm or inspection means

Abstract

The present invention is a system for handling liquid and a method for the same. The system has a container capable of holding a liquid. An electronic storage device is coupled with the container for electronically storing information relating to the liquid stored in the container. The system also has an antenna, for storing information to and reading information from the electronic storage device. Finally, the system has a microprocessor-based controller, coupled with the antenna, for controlling processing of the liquid based on information read from the electronic storage device by the antenna.

Claims

1. A liquid handling system comprising:

a container adapted to hold a liquid and defining a container opening;

a cap securable to the container proximate to the container opening, the cap including a radio frequency identification tag and adapted, when secured to the container, to seal the container for containment of liquid therein; and

a connector including a connector head and a connector probe extending therefrom, the probe having a liquid flow passage therethrough such that the connector is adapted to deliver a flow of liquid from the container through the probe when the connector is engaged with the cap, the connector head including an antenna adapted to communicate (i) with the radio frequency identification tag when the connector head is engaged with the cap, and (ii) with a controller arranged to control dispensation of liquid from the container through the probe in accordance with information received via the antenna from the radio frequency identification tag.

2. The liquid handling system of claim 1, wherein the radio frequency identification tag comprises a passive radio frequency transponder.

3. The liquid handling system of claim 1, wherein the radio frequency identification tag comprises an EEPROM.

4. The liquid handling system of claim 1, wherein the antenna is adapted to both read information from the radio frequency identification tag and store information to the radio frequency identification tag.

5. The liquid handling system of claim 1, wherein the cap comprises a frangible sealing element disposed across or adjacent to a probe receiving aperture defined in the cap.

6. The liquid handling system of claim 5, wherein the frangible sealing element comprises a rupturable membrane.

7. The liquid handling system of claim 1, wherein the container comprises an interior surface, and contains a liquid contacting the interior surface.

8. The liquid handling system of claim 1, wherein the probe has a length, the container has a depth, and the probe length is approximately equal to the container depth.

9. The liquid handling system of claim 1, wherein when the connector head is engaged with the cap, the antenna is vertically aligned with the radio frequency identification tag.

10. The liquid handling system of claim 1, wherein when the connector head is engaged with the cap, the antenna is disposed less than 10 millimeters apart from the radio frequency identification tag.

11. The liquid handling system of claim 1, further comprising the controller and a process tool, wherein the controller is adapted to communicate with the process tool.

12. The liquid handling system of claim 11, wherein the process tool comprises an integrated circuit fabrication process tool.

13. A liquid handling system comprising:

a container adapted to hold a liquid and defining a container opening; and

a cap securable to the container proximate to the container opening and including a radio frequency identification tag, the cap (i) being arranged when secured to the container to seal the container for containment of liquid therein, and (ii) being adapted to engage a connector having a connector head including an antenna and a flow passage-defining dispensation probe extending from the head and adapted to extract liquid from the container when the connector is engaged to the cap;

wherein the radio frequency identification tag and antenna are adapted to permit information stored in the tag to be received by the antenna when the connector head is engaged with the cap so that the antenna can communicate with a controller arranged to control dispensation of liquid from the container through the probe in accordance with information received via the antenna from the radio frequency identification tag.

14. The liquid handling system of claim 13, further comprising the connector.

15. The liquid handling system of claim 13, wherein the antenna is adapted to both read information from the radio frequency identification tag and store information to the radio frequency identification tag.

16. The liquid handling system of claim 13, wherein the cap comprises a frangible sealing element disposed across or adjacent to a probe receiving aperture defined in the cap.

17. The liquid handling system of claim 14, wherein when the connector head is engaged with the cap, the antenna is vertically aligned with the radio frequency identification tag.

18. The liquid handling system of claim 14, wherein when the connector head is engaged with the cap, the antenna is disposed less than 10 millimeters apart from the radio frequency identification tag.

19. The liquid handling system of claim 13, further comprising the controller and a process tool, wherein the controller is adapted to communicate with the process tool.

20. The liquid handling system of claim 19, wherein the process tool comprises an integrated circuit fabrication process tool.

21. A liquid handling system comprising:

a container adapted to hold a liquid and defining a container opening;

a cap securable to the container proximate to the container opening and including an electronic information storage element, the cap being arranged to engage a connector having (i) a connector head, (ii) a flow passage defined therethrough, and (iii) an electronic information retrieval element, wherein when the connector head is engaged with the cap, the electronic information storage element is disposed less than 10 millimeters apart from the electronic information retrieval element to permit communication therebetween.

22. The liquid handling system of claim 21, further comprising the connector.

23. The liquid handling system of claim 21, wherein the electronic information storage element comprises a radio frequency identification tag.

24. The liquid handling system of claim 21, wherein the electronic information storage element comprises a passive transponder.

25. The liquid handling system of claim 21, wherein the electronic information storage element comprises an EEPROM.

26. The liquid handling system of claim 21, wherein the electronic information retrieval element comprises a RF antenna.

27. The liquid handling system of claim 21, wherein a gap is maintained between the electronic information retrieval element and the electronic information storage element when the connector head is engaged with the cap.

28. The liquid handling system of claim 21, wherein the electronic information retrieval element is adapted to both read information from the electronic information storage element and store information to the electronic information storage element.

29. The liquid handling system of claim 21, wherein the cap comprises a frangible sealing element disposed across or adjacent to a probe receiving aperture defined in the cap.

30. The liquid handling system of claim 21, further comprising the controller and a process tool, wherein the controller is adapted to communicate with the process tool.

31. The liquid handling system of claim 30, wherein the process tool comprises an integrated circuit fabrication process tool.

32. A connector adapted for use with a liquid storage container having (i) a container opening and (ii) a cap secured to the container proximate to the container opening and including a radio frequency identification tag, the connector comprising:

a connector head adapted to engage the cap;

a connector probe protruding from the connector head, defining a flow passage therethrough, and adapted to be inserted through the cap into an interior portion of the container to facilitate dispensation of liquid through the flow passage; and

an antenna adapted to receive information from the radio frequency identification tag when the connector head is engaged with the cap, and adapted to communicate with a controller arranged to control dispensation of liquid from the container in accordance with the information received.

33. The connector of claim 32, wherein the radio frequency identification tag comprises a passive radio frequency transponder.

34. The connector of claim 32, wherein the radio frequency identification tag comprises an EEPROM.

35. A liquid handling system comprising the connector of claim 32, the container, and the cap.

36. A liquid handing method utilizing a container adapted to hold a liquid and defining a container opening, utilizing a cap securable to the container proximate to the container opening and including a radio frequency identification tag, and utilizing a connector having (i) a connector head with a connector probe extending therefrom, (ii) a liquid flow passage defined through the probe, and (iii) an antenna adapted to communicate with the radio frequency identification tag when the connector head is engaged with the cap, the method comprising the steps of:

reading from the radio frequency identification tag information about a liquid contained within the container; and

controlling any of dispensation and use of the liquid based on information read from the radio frequency identification tag.

37. The method of claim 36, wherein the reading step includes reading by the antenna disposed at distance of less than about 10 millimeters apart from the radio frequency identification tag.

38. The method of claim 36, further comprising the step of engaging the connector with the cap.

39. The method of claim 36, wherein the controlling step includes controlling a process tool adapted to use the liquid.

40. The method of claim 39, wherein the process tool comprises an integrated circuit fabrication process tool.

41. The method of claim 36, further comprising the steps of:

supplying a liquid to the container;

securing the cap to the container proximate to the opening; and

storing information about the liquid within the container in the radio frequency identification tag.

42. A liquid handling method comprising the steps of:

receiving a connector and engaging the connector to a radio frequency identification tag-containing cap secured to a container adapted to hold a liquid and defining a container opening adjacent to the cap, the connector having a connector head including an antenna and a flow passage-defining dispensation probe extending from the head and adapted to extract liquid from the container;

reading from the radio frequency identification tag information about a liquid contained within the container; and

controlling any of dispensation and use of the liquid based on information read from the radio frequency identification tag.

43. The method of claim 42, wherein the reading step includes reading by the antenna disposed at distance of less than about 10 millimeters apart from the radio frequency identification tag.

44. The method of claim 42, wherein the controlling step utilizes a controller in at least intermittent communication with the antenna.

45. The method of claim 42, wherein the controlling step includes controlling a process tool adapted to use the liquid.

46. The method of claim 45, wherein the process tool comprises an integrated circuit fabrication process tool.

47. The method of claim 42, further comprising the steps of:

supplying a liquid to the container;

storing information about the liquid within the container in the radio frequency identification tag.

48. A liquid handling method utilizing a connector having a connector head, having a connector probe protruding from the connector head and defining a flow passage therethrough, and having an antenna adapted to communicate with a radio frequency identification tag, the method comprising the steps of:

placing the connector probe into a container having a cap secured to the container proximate to a container opening, wherein the cap includes a radio frequency identification tag;

engaging the connector head to the cap;

reading from the radio frequency identification tag information about a liquid contained within the container; and

controlling any of dispensation and use of the liquid based on information read from the radio frequency identification tag.

49. The method of claim 48, wherein the reading step includes reading by the antenna disposed at distance of less than about 10 millimeters apart from the radio frequency identification tag.

50. The method of claim 48, wherein the controlling step utilizes a controller in at least intermittent communication with the antenna.

51. The method of claim 48, wherein the controlling step includes controlling a process tool adapted to use the liquid.

52. The method of claim 51, wherein the process tool comprises an integrated circuit fabrication process tool.

53. The method of claim 48, further comprising the steps of:

supplying a liquid to the container;

storing information about the liquid within the container in the radio frequency identification tag.