Thin, flexible actuator array to produce complex shapes and force distributions

• US 7,665,300 B2
• Filed: 03/11/2005
• Issued: 02/23/2010
• Est. Priority Date: 03/11/2005
• Status: Expired due to Fees

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Biggs, S. James, Daverman, R. Dodge
• Primary Examiner(s): Nguyen; Hoang M
• Application Number:
  US11/078,195
• Publication Number:
  US 20060201149A1
• Time in Patent Office: 1,810 Days
• Field of Search: 60527-529
• US Class Current: 60/528
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: H01H 2061/006 Micromechanical thermal relay
• CPC Class Codes: H01H 37/323 making use of shape memory materials in thermal relays H01H61/0107; release mechanism H01H71/145; treatment of SMF alloys C22F1/006; for control of temperature G05D23/024
• CPC Class Codes: H01H 61/0107 making use of shape memory materials

Abstract

An actuator includes a bistable mechanism having a tension beam and a compression beam defined by a relief slit in a flexible substrate; and a first shape memory element that upon heating actuates the actuator from a first position to a second position. A heat source can be thermally coupled to actuate the first shape memory element, or the first shape memory element can be heated by passing current through the element. The actuators can be formed in an array. Such arrays can be useful for tactile displays, massagers, and the like. Also included are methods of operation and manufacturing.

Claims

1. An actuator array, wherein each actuator comprises:

a bistable mechanism including a tension beam and a deformed compression beam separated by a relief slit in a flexible substrate, the compression beam being deformed with a central region displaced in a transverse direction from the flexible substrate at the beam ends; and

a first shape memory element mechanically coupled to the bistable mechanism that upon heating exerts a force that actuates the deformed compression beam from a first stable position on one side of the substrate to a second stable position on an opposite side of the substrate, the first shape memory element comprising at least two substantially parallel shape memory alloy wires electrically coupled in series to the electrical leads.

2. The actuator array of claim 1, wherein the first shape memory element comprises a shape memory alloy, a bimetallic strip, or a thermally-actuated shape memory polymer.

3. The actuator array of claim 1, further comprising electrical leads coupled to the first shape memory element, whereby the first shape memory element is heated by application of electrical current.

4. The actuator array of claim 1, further comprising a first heat source thermally coupled to the first shape memory element.

5. The actuator array of claim 4, further comprising a second heat source thermally coupled to a second shape memory element at each bistable mechanism that heats the second shape memory element to exert a force that actuates the bistable mechanism from the second position to the first position.

6. The actuator array of claim 5, wherein each shape memory element comprises a laminated array of substantially parallel shape memory alloy wires.

7. The actuator array of claim 6, wherein the wires comprise a shape memory alloy selected from the group consisting of NiTi, CuZnAl, and CuAlNi.

8. The actuator array of claim 7, wherein the wires are NiTi.

9. The actuator array of claim 7 wherein the shape memory wires have a diameter of less than about 500 micrometers.

10. The actuator array of claim 9 wherein the ratio of the diameter of the wires divided by the distance between adjacent wires is less than about 1.

11. The actuator array of claim 10 wherein each actuator operates in air at 25°

C at a frequency of at least about 2 cycles per second.

12. The actuator array of claim 1 wherein the tension beam comprises a permanent out-of-plane deformation.

13. The actuator array of claim 1 wherein each shape memory element is coupled to the compression beam to convert the displacement of each shape memory element into a greater displacement at the compression beam.

14. The actuator array of claim 1 further comprising a second tension beam defined by a second relief slit, wherein the beams and the slits are substantially parallel.

15. The actuator array of claim 1, wherein the flexible substrate is in the form of a tape comprising the array of actuators as a linear array.

16. The actuator array of claim 1, wherein the flexible substrate is in the form of a sheet comprising the array of actuators as a two-dimensional array.

17. The actuator array of claim 1 wherein the flexible substrate comprises a material selected from the group consisting of steel alloy, phosphor bronze alloy, aluminum alloy, titanium alloy, carbon fiber/epoxy composite, fiberglass/epoxy composite, Kevlar/epoxy composite, polyimide, polyamide, polyester, polyvinylidene fluoride, polypropylene, polyethylene, and urethane.

18. The actuator array of claim 4, wherein the first shape memory element comprises a bimetallic layer.

19. The actuator array of claim 4, wherein the actuators are adapted for automatic control.

20. The actuator array of claim 19, further comprising one or more multiplexing diodes to independently control each actuator.

21. The actuator array of claim 20, further comprising an open loop automated controller coupled to the actuators.

22. A method of operating an actuator array, wherein each actuator comprises:

a bistable mechanism including a tension beam and a compression beam separated by a relief slit in a flexible substrate, the compression beam being deformed with a central region displaced in a transverse direction from the flexible substrate at the beam ends; and

a first shape memory element mechanically coupled to the bistable mechanism;

the method comprising the step of automatically, independently controlling each actuator by heating the first shape memory element to exert a force that actuates the deformed compression beam from a first stable position on one side of the substrate to a second stable position on an opposite side of the substrate, the first shape memory element comprising at least two substantially parallel shape memory alloy wires electrically coupled in series to the electrical leads.

23. The method of claim 22, further comprising passing electrical current through the first shape memory element to heat each shape memory element.

24. The method of claim 22, further comprising heating the first shape memory element with a heat source coupled to each shape memory element.

25. The method of claim 22, further comprising heating a second heat source thermally coupled to a second shape memory element at each actuator to exert a force that actuates the bistable mechanism from the second position to the first position.

26. The method of claim 25, further comprising deactivating the heat sources after actuating each actuator.

27. The method of claim 25, wherein the first shape memory element is mechanically coupled to the compression beam, further comprising controlling the displacement of the first shape memory element to give a greater displacement at the compression beam.

28. The method of claim 25, further comprising operating the actuators at a frequency at 25°

C. in air of at least about 2 cycles per second.

29. The method of claim 25, wherein the first shape memory element comprises a bimetallic layer.