Method and apparatus for closed loop offset cancellation

• US 7,665,361 B2
• Filed: 01/25/2007
• Issued: 02/23/2010
• Est. Priority Date: 01/25/2007
• Status: Expired due to Fees

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Inventors: Kraver, Keith L., Fuhrmann, Marco, Miller, Todd F.
• Primary Examiner(s): Kwok; Helen C.
• Application Number:
  US11/626,924
• Publication Number:
  US 20080178671A1
• Time in Patent Office: 1,125 Days
• Field of Search: 735/141.7, 735/141.8, 735/142.1, 735/142.2, 735/142.3, 735/142.4, 735/143.2, 734/97
• US Class Current: 73/514.18
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means

Abstract

An apparatus (100, 200) and method (300) for sensing acceleration are provided. The method includes producing (305) a first signal in response to an acceleration sensed by a transducer, producing (310) a second signal based on the first signal, and actuating (315) the transducer in response to the second signal to remove offset in the transducer. The first signal represents the acceleration, and the second signal represents a low frequency component associated with an offset in the transducer. The apparatus (100) includes a transducer (102) producing a capacitance in response to the acceleration, a sensing system (104, 106, 108) producing a first signal from the capacitance representing the acceleration, and a compensation system (112, 110) coupled between the sensing system and transducer. The compensation system produces a second signal based on the first signal for substantially removing an offset of the transducer.

Claims

1. A method for operating a transducer having a moveable element that displaces from an initial position to sense acceleration, the method comprising the steps of:

producing a first signal that is responsive to a capacitance of the transducer;

applying a first filter to the first signal, wherein the first filter has a frequency range pre-selected to acquire acceleration data, resulting in a filtered first signal;

producing, based on the filtered first signal, a second signal representing the acceleration sensed by the transducer, wherein the acceleration has a signal frequency within the frequency range of the first filter;

applying a low-pass filter having a cutoff frequency lower than the signal frequency of the acceleration to the second signal to thereby produce a third signal based on the second signal, wherein the third signal represents a low frequency component having a frequency lower than the signal frequency of the acceleration such that the third signal is associated with an offset of the moveable element of the transducer from the initial position; and

actuating the transducer with the third signal representing the low-frequency component to thereby apply an electrostatic force that restores the moveable element of the transducer to the initial position in response to an output of the low-pass filter and thereby substantially cancel the offset in the transducer.

2. A method according to claim 1, wherein said step of producing the first signal comprises:

producing a capacitance in response to the acceleration sensed by the transducer;

producing a voltage responsive to the capacitance; and

converting the voltage to a digital signal to produce the first signal.

3. A method according to claim 1, wherein the transducer comprises a micro-electro-mechanical system (MEMS) device having the moveable element, wherein the method further comprises sensing a displacement of the moveable element in response to the acceleration, and wherein said step of producing a first signal comprises producing the first signal in response to the displacement.

4. A method according to claim 1, wherein said applying the low-pass filter step comprises filtering the second signal through a range of about 0.01 Hz to about 10 Hz to produce the low frequency component of the acceleration sensed by the transducer.

5. A method according to claim 1, wherein said step of actuating comprises:

applying an electrostatic voltage to the moveable element of the transducer; and

displacing the moveable element of the transducer in response to the electrostatic voltage.

6. A method according to claim 1, wherein the second signal comprises a digital signal, and wherein said step of producing a third signal comprises:

filtering the low frequency component from the digital signal;

converting the low frequency component to a voltage; and

producing an electrostatic force from the voltage.

7. A method according to claim 1, wherein said applying the low-pass filter step comprises:

filtering the low frequency component from the second signal;

converting the low frequency component to a fourth signal; and

producing an electrostatic force from the fourth signal.

8. A method according to claim 1, wherein said step of producing a first signal comprises:

producing a bit stream in response to the acceleration sensed by the transducer; and

mapping the bit stream to a digital value,

the first signal comprising the digital value.

22. The method of claim 1 wherein the offset is a DC offset from the initial position of the moveable element, wherein the second signal obtained from the low-pass filter represents the DC offset, and wherein the actuating comprises substantially eliminating the DC offset by restoring the moveable element to the initial position in response to the second signal.

9. An apparatus for sensing an acceleration having a signal frequency, the apparatus comprising:

a transducer having an input and an output and a moveable element, said transducer configured to produce a capacitance based upon displacement of the moveable element from an initial position in response to the acceleration;

a sensing system having an input coupled to said output of said transducer and having an output, said sensing system configured to produce a first signal from said capacitance, wherein said first signal is proportional to the acceleration, and said first signal is produced by applying a first filter of the sensing system to a capacitance-responsive signal that is derived from the capacitance, wherein the first filter has a frequency range pre-selected to acquire acceleration data; and

a compensation system having an input coupled to said output of said sensing system and having an output coupled to said input of said transducer, said compensation system configured to;

filter the first signal with a low-pass filter having a cutoff frequency lower than the signal frequency of the acceleration to thereby produce a second signal based on said first signal, said second signal being output representing a low-frequency component of the first signal having a frequency lower than the signal frequency of the acceleration and indicating an offset of said transducer; and

supply the low frequency component that is output from the low-pass filter to the transducer to thereby apply an electrostatic force to restore the moveable element of the transducer to the initial position in response to the output of the low-pass filter and to thereby substantially cancel the offset in the transducer.

10. An apparatus according to claim 9, wherein said sensing system comprises:

a capacitance-to-voltage converter having an input coupled to said output of said transducer and having an output, said capacitance-to-voltage converter configured to produce a voltage proportional to said acceleration; and

an analog-to-digital converter (ADC) having an input coupled to said output of said capacitance-to-voltage converter and having an output coupled to said input of said compensation system.

11. An apparatus according to claim 9, wherein

said sensing system comprises:

a modulator having an input coupled to said output of said transducer and having an output, said modulator configured to produce a bit stream based on said capacitance;

a sinc filter having an input coupled to said output of said modulator and having an output, said sinc filter configured to map said bit stream to a digital value, said digital value being proportional to said acceleration;

the first filter, which is a first low pass filter (LPF) having an input coupled to said output of said sinc filter and having an output; and

a trim circuit having an input coupled to said output of said first LPF and having an output; and

said compensation system comprises;

a second LPF having an input coupled to said output of said trim circuit and having an output; and

a digital-to-analog converter having an input coupled to said output of said second LPF and having an output coupled to said input of said transducer.

12. An apparatus according to claim 9, wherein

said sensing system comprises:

a switched capacitance converter having an input coupled to said output of said transducer and having an output, said switched capacitance converter configured to convert said capacitance to a voltage;

the first filter, which is a first low pass filter (LPF) having an input coupled to said output of said switched capacitance converter and having an output; and

a trim circuit having an input coupled to said output of said first LPF and having an output; and

said compensation system comprises;

a second LPF having an input coupled to said output of said trim circuit and having an output; and

a digital to analog converter having an input coupled to said output of said second LPF and having an output coupled to said input of said transducer.

13. An apparatus according to claim 9, wherein said compensation system is further configured to produce said second signal based on said low frequency component of said first signal.

14. An apparatus according to claim 13, wherein said low frequency component is less than or equal to about 10 Hz.

15. An apparatus according to claim 13, wherein said low frequency component is from about 0.01 Hz to about 10 Hz.

16. An apparatus according to claim 9, wherein the moveable element is responsive to the acceleration and also to said second signal, independent of the acceleration, to compensate for said offset from the initial position.

23. The apparatus of claim 9 wherein the offset is a DC offset from the initial position of the moveable element, wherein the second signal obtained from the low-pass filter represents the DC offset, and wherein the supplying comprises substantially eliminating the DC offset by restoring the moveable element to the initial position in response to the second signal.

17. A method for operating a transducer having a moveable element that displaces from an initial position to sense an acceleration, the method comprising:

sensing a capacitance representing an acceleration sensed by the transducer, the acceleration having a signal frequency;

producing a first signal that is responsive to the capacitance;

applying a first filter to the first signal, wherein the first filter has a frequency range pre-selected to acquire acceleration data, resulting in a filtered first signal;

producing, based on the filtered first signal, a second signal representing the acceleration, wherein the acceleration has a signal frequency within the frequency range of the first filter;

applying a low-pass filter having a cutoff frequency below the signal frequency of the acceleration to the second signal to thereby extract a low frequency component from the sensed capacitance, the low frequency component representing an offset of the moveable element from the initial position and having a frequency lower than the signal frequency of the acceleration; and

supplying the low frequency component that is output from the low-pass filter to the transducer to thereby apply an electrostatic force to restore the moveable element of the transducer to the initial position in response to the output of the low-pass filter and thereby substantially cancel the offset in the transducer.

18. A method according to claim 17, wherein producing the first signal comprises:

producing a voltage responsive to the capacitance, the voltage proportional to the acceleration; and

converting the voltage to a digital signal.

19. A method according to claim 18, wherein said step of applying the low-pass filter comprises filtering the digital signal through a range from about 0.01 Hz to about 10 Hz.

20. A method according to claim 17, wherein the transducer comprises a micro-electro-mechanical system (MEMS) device;

and wherein the method further comprises centering the moveable element in response to the electrostatic force.

21. A method according to claim 17, wherein the offset is due to a temperature effect and a stress effect on the transducer.

24. The method of claim 17 wherein the offset is a DC offset from the initial position of the moveable element, wherein the second signal obtained from the low-pass filter represents the DC offset, and wherein the supplying comprises substantially eliminating the DC offset by restoring the moveable element to the initial position in response to the second signal.