Transfer chamber for flat display device manufacturing apparatus

• US 7,665,946 B2
• Filed: 11/01/2004
• Issued: 02/23/2010
• Est. Priority Date: 11/04/2003
• Status: Expired due to Fees

• Current Assignee: Advanced Display Process Engineering Co., Ltd.
• Original Assignee: Advanced Display Process Engineering Co., Ltd.
• Inventors: Choi, Jun Young, Lee, Cheol Won, Lee, Sang Baek, Hur, Gwang Ho
• Primary Examiner(s): Lowe; Michael S
• Application Number:
  US10/978,967
• Publication Number:
  US 20050095089A1
• Time in Patent Office: 1,940 Days
• Field of Search: 414/217, 414/416.01, 414/225.01, 414/744.1, 414/939, 414/941, 414/744.5, 901/29, 901/30
• US Class Current: 414/217
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber
• CPC Class Codes: Y10S 414/141 includes means for gripping wafer

Abstract

A transfer chamber for a flat display device manufacturing apparatus is provided. The transfer chamber may combine functions of a transfer chamber and a load-lock chamber. A robot may be provided aside from a center of the transfer chamber, and a buffer may be provided so as to avoid interference with the robot. An aligner may adjust a position of a substrate mounted on the buffer.

Claims

1. A transfer chamber for a flat display device manufacturing apparatus, comprising:

a robot shaft installed within the transfer chamber;

a first robot arm having a first end rotatably coupled to the robot shaft, and a second end rotatably coupled to a first end of a second robot arm;

a robot hand rotatably coupled to a second end of the second robot arm, wherein the robot hand is configured to transfer a substrate disposed thereon into and out of the transfer chamber along a transfer path; and

a buffer, comprising;

a buffer plate, comprising;

plurality of buffer pins configured to support a substrate;

first, second, third and fourth buffer fingers disposed substantially parallel to each other, with the third and fourth buffer fingers being shorter than the first and fourth buffer fingers; and

a connecting bar, wherein the first and fourth buffer fingers are respectively connected to opposite end portions of the connecting bar, and the second and third buffer fingers are connected to the connecting bar at a position inside of the first and fourth buffer fingers; and

a driving system that moves first and second ends of the buffer plate up and down.

2. The transfer chamber of claim 1, wherein the robot shaft is installed in the transfer chamber at a position that is closer to a sidewall of the transfer chamber than to a centerline of the chamber, the centerline being substantially parallel to the transfer path, wherein the position of the robot shaft is offset from both the centerline and the transfer path.

3. The transfer chamber of claim 1, wherein the driving system comprises:

a first driver that supports and moves the first end of the buffer plate up and down;

a second driver that supports and moves the second end of the buffer plate up and down; and

a power transmission device that operably couples the first and second drivers such that the first and second ends of the buffer plate move up and down simultaneously.

4. The transfer chamber of claim 3, wherein the first driver supports and moves the second and the tbird buffer fingers, and the second driver supports and moves the first and the fourth buffer fingers.

5. The transfer chamber of claim 1, wherein the second end of the second robot arm is coupled to the robot hand at a position that is offset from a line of symmetry of the robot hand.