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Ultrasonic transducer, ultrasonic probe and method for fabricating the same

  • US 7,667,374 B2
  • Filed: 01/23/2007
  • Issued: 02/23/2010
  • Est. Priority Date: 03/24/2006
  • Status: Active Grant
First Claim
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1. An ultrasonic transducer for transmitting and receiving ultrasonic comprising:

  • a semiconductor substrate;

    a first insulating film provided on the semiconductor substrate, wherein the first insulating film comprises silicon oxide;

    a lower electrode provided on the first insulating film;

    a second insulating film provided on the lower electrode, wherein the second insulating film comprises silicon oxide;

    a gap provided above the second insulating film;

    a third insulating film provided on the gap, wherein the third insulating film comprises silicon oxide;

    an upper electrode provided above the third insulating film;

    a fourth insulating film provided above the upper electrode, wherein the fourth insulating film is a compression stress layer, the fourth insulating film comprising silicon oxide; and

    a fifth insulating film provided on the fourth insulating film, wherein the fifth insulating film is a tensile stress layer,wherein the third insulating film, the upper electrode, the fourth insulating film and the fifth insulating film above the gap comprise a vibratable membrane.

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