Inductor structure
First Claim
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1. An inductor structure, comprising:
- a substrate;
a plurality of insulation layers on the substrate;
a first spiral conductive coil disposed in the insulation layers to form an inductor generating a magnetic field in a first direction; and
a second spiral conductive coil disposed in the insulation layers to form an inductor generating a magnetic field in a second direction;
wherein the first direction and the second direction are not parallel to each other, and a conductive section of the first spiral conductive coil and a conductive section of the second spiral conductive coil are disposed in a same one of the insulation layers and cross over to each other.
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Abstract
An inductor structure comprising a substrate; a plurality of insulation layers on the substrate; a first spiral electric conductive coil positioned in the insulation layers to form an inductor having a first direction of magnetic field; a second spiral electric conductive coil positioned in the insulation layers to form an inductor having a second direction of magnetic field, in which, the two or more inductors are independently positioned in a same 3-D space and have a good integration.
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Citations
8 Claims
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1. An inductor structure, comprising:
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a substrate; a plurality of insulation layers on the substrate; a first spiral conductive coil disposed in the insulation layers to form an inductor generating a magnetic field in a first direction; and a second spiral conductive coil disposed in the insulation layers to form an inductor generating a magnetic field in a second direction; wherein the first direction and the second direction are not parallel to each other, and a conductive section of the first spiral conductive coil and a conductive section of the second spiral conductive coil are disposed in a same one of the insulation layers and cross over to each other. - View Dependent Claims (7, 8)
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2. The inductor structure as claimed in claim, wherein the first spiral conductive coil has a plurality of first turns and each of the first turns comprises:
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a first conductive section in a first insulation layer of the insulation layers; a second conductive section in a second insulation layer of the insulation layers; a third conductive section comprising a first group of via plugs formed in the insulation layers to connect a first end of the first conductive section and a first end of the second conductive section; and a fourth conductive section comprising a second group of via plugs formed in the insulation layers to connect a second end of the second conductive section and a second end of the first conductive section of an adjacent another first turn. - View Dependent Claims (3, 4, 5, 6)
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Specification