Method and device for providing electronic circuitry on a backplate

• US 7,668,415 B2
• Filed: 03/25/2005
• Issued: 02/23/2010
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Tyger, Karen
• Primary Examiner(s): Font; Frank G
• Assistant Examiner(s): Anderson; Guy G
• Application Number:
  US11/090,491
• Publication Number:
  US 20060067642A1
• Time in Patent Office: 1,796 Days
• Field of Search: 359290-295, 359528-529, 359/298, 359244-248, 359656-661, 359672-673, 428/690, 385/147, 385/8, 385/14, 385/18, 257/704
• US Class Current: 385/14
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G09G 2300/04 Structural and physical details of display devices
• CPC Class Codes: G09G 3/3466 based on interferometric effect
• CPC Class Codes: Y10T 29/49155 Manufacturing circuit on or in base

Abstract

A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Claims

1. A display, comprising:

a transparent substrate;

an array of interferometric modulators comprising reflective elements that are configured to reflect light through said transparent substrate;

a backplane comprising a first surface proximal to the array of interferometric modulators and comprising an application-specific integrated circuit (ASIC) fabricated on said first surface of the backplane, wherein the ASIC comprises driver circuitry configured to control the movement of the reflective elements, the ASIC comprising a silicon layer, wherein the backplane is attached to the transparent substrate via a seal to form a cavity between the transparent substrate and the backplane, and wherein said cavity comprises an empty space between at least a portion of the array of interferometric modulators and the backplane; and

a plurality of electrical connections providing electronic communication between the ASIC on the backplane and the array of interferometric modulators.

2. The display of claim 1, wherein the electrical connections comprise a first conducting material in electronic communication with said ASIC and a second conducting material in electronic communication with said array of interferometric modulators.

3. The display of claim 2, wherein the first conducting material is in electrical communication with the second conducting material through an anisotropic conducting film.

4. The display of claim 2, wherein said first conducting material comprises a bump of conducting material.

5. The method of claim 4, wherein said second conducting material comprises a bump of conducting material.

6. The display of claim 2, wherein the second conducting material comprises a conducting support post.

7. The display of claim 6, wherein the first conducting material comprises a conducting trace located on the first surface of the backplane.

8. The display of claim 6, wherein the first conducting material comprises a bump of conducting material.

9. The display of claim 1, wherein no adhesive is provided between the layer of silicon and the first surface of the backplane.

21. The device of claim 2, wherein no adhesive is provided between the layer of silicon and the first surface of the backplane.

23. The device of claim 1, wherein the backplane comprises glass.

10. A device comprising an interferometric modulator-based display, said display comprising:

a transparent substrate, said transparent substrate comprising a first substrate surface;

an array of interferometric modulators comprising reflective elements that are configured to reflect light through said transparent substrate;

a backplane comprising a first surface proximal to the array of interferometric modulators, wherein said first surface of the backplane supports an application-specific integrated circuit (ASIC) configured to control the movement of the reflective elements wherein the backplane is attached to the transparent substrate via a seal to form a cavity between the transparent substrate and the backplane, and wherein said cavity comprises an empty space between at least a portion of the array of interferometric modulators and the backplane; and

a plurality of conductive support posts extending upwards from the array of interferometric modulators and contacting a first conductive material supported by the backplate and in electronic communication with the ASIC to provide electronic communication between the ASIC on the backplane and the array of interferometric modulators.

18. The device of claim 10, wherein said first conducting material comprises a bump of conducting material.

19. The device of claim 10, wherein the first conducting material comprises a conducting trace located on the first surface of the backplane.

20. The device of claim 10 wherein the ASIC fabricated on the first surface of the backplane comprises a layer of silicon fabricated on the first surface of the backplane.

22. The device of claim 20, wherein the backplane comprises glass.

11. A display, comprising:

a transparent substrate, said transparent substrate comprising a first substrate surface;

an array of interferometric modulators comprising reflective elements that are configured to reflect light through said transparent substrate;

a backplane comprising a first surface proximal to the array of interferometric modulators, wherein said first surface of the backplane supports an application-specific integrated circuit (ASIC) configured to control the movement of the reflective elements, the ASIC comprising a silicon layer, wherein the backplane is attached to the transparent substrate via a seal to form a cavity between the transparent substrate and the backplane, and wherein said cavity comprises an empty space between at least a portion of the array of interferometric modulators and the backplane; and

means for providing electronic communication between the ASIC on the backplane and the array of interferometric modulators.

12. The display of claim 11, wherein the means for providing electronic communication comprises a first conducting material in electronic communication with said ASIC and a second conducting material in electronic communication with said array of interferometric modulators.

13. The display of claim 12, wherein the first conducting material is in electrical communication with the second conducting material through an anisotropic conducting film.

14. The display of claim 12, wherein said first conducting material comprises a bump of conducting material.

15. The display of claim 12, wherein the second conducting material comprises a conducting support post.

16. The display of claim 12, wherein the first conducting material comprises a conducting trace located on the first surface of the backplane.

17. The display of claim 11, wherein no adhesive is provided between the layer of silicon and the first surface of the backplane.

24. The device of claim 11, wherein the backplane comprises glass.