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Method and apparatus for randomizing dispatch order for single wafer processing

  • US 7,668,615 B2
  • Filed: 10/02/2007
  • Issued: 02/23/2010
  • Est. Priority Date: 10/02/2007
  • Status: Active Grant
First Claim
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1. A method for dispatching wafers for processing in a tool, comprising:

  • identifying a queue of wafers available to be processed in the tool;

    randomly selecting one of the wafers based at least in part on a length of time each wafer has been in the queue; and

    dispatching the selected wafer for processing in the tool.

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