Method and apparatus for randomizing dispatch order for single wafer processing
First Claim
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1. A method for dispatching wafers for processing in a tool, comprising:
- identifying a queue of wafers available to be processed in the tool;
randomly selecting one of the wafers based at least in part on a length of time each wafer has been in the queue; and
dispatching the selected wafer for processing in the tool.
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Abstract
A method for dispatching wafers for processing in a tool includes identifying a queue of wafers available to be processed in the tool. One of the wafers is randomly selected based at least in part on a length of time each wafer has been in the queue. The selected wafer is dispatched for processing in the tool.
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Citations
17 Claims
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1. A method for dispatching wafers for processing in a tool, comprising:
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identifying a queue of wafers available to be processed in the tool; randomly selecting one of the wafers based at least in part on a length of time each wafer has been in the queue; and dispatching the selected wafer for processing in the tool. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A manufacturing system, comprising:
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a tool operable to process wafers; a workflow unit operable to identify a queue of wafers available to be processed in the tool, randomly select one of the wafers based at least in part on a length of time each wafer has been in the queue, and dispatch the selected wafer for processing in the tool. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A system, comprising:
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means for identifying a queue of wafers available to be processed in a tool; means for randomly selecting one of the wafers based at least in part on a length of time each wafer has been in the queue; and means for dispatching the selected wafer for processing in the tool.
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Specification