Optical films and methods of making the same
First Claim
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1. A method, comprising:
- providing an article that includes a layer comprising a plurality of rows of a metal where each adjacent row of metal is separated by a trench having a depth of about 100 nm or more, the rows of the metal forming a grating having a period of 1,000 nm or less, the layer being a wire grid polarizer for radiation having a wavelength in a range from about 150 nm to about 2,000 nm;
filling at least about 80% of a volume of each trench with a second material different from the metal by sequentially forming a plurality of monolayers of the second material within the trenches, wherein;
forming the plurality of monolayers of the second material comprises depositing a monolayer of a precursor and exposing the monolayer of the precursor to a reagent to provide a monolayer of the second material; and
the second material is an inorganic dielectric material.
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Abstract
Films for optical use, articles containing such films, methods for making such films, and systems that utilize such films, are disclosed.
111 Citations
5 Claims
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1. A method, comprising:
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providing an article that includes a layer comprising a plurality of rows of a metal where each adjacent row of metal is separated by a trench having a depth of about 100 nm or more, the rows of the metal forming a grating having a period of 1,000 nm or less, the layer being a wire grid polarizer for radiation having a wavelength in a range from about 150 nm to about 2,000 nm; filling at least about 80% of a volume of each trench with a second material different from the metal by sequentially forming a plurality of monolayers of the second material within the trenches, wherein; forming the plurality of monolayers of the second material comprises depositing a monolayer of a precursor and exposing the monolayer of the precursor to a reagent to provide a monolayer of the second material; and the second material is an inorganic dielectric material. - View Dependent Claims (2, 3, 4, 5)
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Specification