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Optical films and methods of making the same

  • US 7,670,758 B2
  • Filed: 05/27/2005
  • Issued: 03/02/2010
  • Est. Priority Date: 04/15/2004
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • providing an article that includes a layer comprising a plurality of rows of a metal where each adjacent row of metal is separated by a trench having a depth of about 100 nm or more, the rows of the metal forming a grating having a period of 1,000 nm or less, the layer being a wire grid polarizer for radiation having a wavelength in a range from about 150 nm to about 2,000 nm;

    filling at least about 80% of a volume of each trench with a second material different from the metal by sequentially forming a plurality of monolayers of the second material within the trenches, wherein;

    forming the plurality of monolayers of the second material comprises depositing a monolayer of a precursor and exposing the monolayer of the precursor to a reagent to provide a monolayer of the second material; and

    the second material is an inorganic dielectric material.

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