Configuration of high-voltage semiconductor power device to achieve three dimensional charge coupling
First Claim
1. A method for manufacturing a semiconductor device comprising:
- forming a trench with insulated sidewalls extending from a top region through an intermediate region toward a bottom region to provide a controllable current path traversing through said intermediate region; and
filling said trench with a dielectric followed by forming nano-nodules as charge-islands to distribute substantially uniformly over an entire volume of said dielectric in said trench for electrically coupling with said intermediate region for continuously and uniformly distributing a voltage drop through said current path.
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Abstract
This invention discloses semiconductor device that includes a top region and a bottom region with an intermediate region disposed between said top region and said bottom region with a controllable current path traversing through the intermediate region. The semiconductor device further includes a trench with padded with insulation layer on sidewalls extended from the top region through the intermediate region toward the bottom region wherein the trench includes randomly and substantially uniformly distributed nano-nodules as charge-islands in contact with a drain region below the trench for electrically coupling with the intermediate region for continuously and uniformly distributing a voltage drop through the current path.
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14 Claims
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1. A method for manufacturing a semiconductor device comprising:
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forming a trench with insulated sidewalls extending from a top region through an intermediate region toward a bottom region to provide a controllable current path traversing through said intermediate region; and filling said trench with a dielectric followed by forming nano-nodules as charge-islands to distribute substantially uniformly over an entire volume of said dielectric in said trench for electrically coupling with said intermediate region for continuously and uniformly distributing a voltage drop through said current path. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification