Dynamic quantity sensor

• US 7,671,432 B2
• Filed: 02/22/2007
• Issued: 03/02/2010
• Est. Priority Date: 11/07/2002
• Status: Active Grant

• Current Assignee: DENSO Corporation
• Original Assignee: DENSO Corporation
• Inventors: Fujii, Tetsuo
• Primary Examiner(s): CLARK, JASMINE JHIHAN B
• Application Number:
  US11/709,271
• Publication Number:
  US 20070158822A1
• Time in Patent Office: 1,104 Days
• Field of Search: 257/704, 257/710, 257/924, 257E2318-E23193, 257/226, 257/232, 257/254, 257414-440, 257/470, 257678-733, 257/790, 257E21499-E21502
• US Class Current: 257/419
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48137 the bodies being arranged next to each other, e.g. on a common substrate
• CPC Class Codes: H01L 2224/48247 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00012 Relevant to the scope of the group, the symbol of which is combined with the symbol of this group
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/181 Encapsulation
• CPC Class Codes: H01L 2924/19107 off-chip wires
• CPC Class Codes: H01L 2924/3025 Electromagnetic shielding

Abstract

A dynamic quantity sensor includes a sensor chip having a movable portion at one surface side thereof and a silicon layer at another surface side thereof. The movable portion is displaced under application of a dynamic quantity. The silicon layer is separated from the movable portion through an insulator. The dynamic quantity sensor also includes a circuit chip for transmitting/receiving electrical signals to/from the sensor chip. The circuit chip is disposed to confront the one surface of the sensor chip through a gap portion and cover the movable portion. The sensor chip and the circuit chip are bonded to each other around the gap portion so that a bonding portion is formed to substantially surround the gap portion and thereby seal the gap portion.

Claims

1. A dynamic quantity sensor comprising:

a sensor chip including a movable portion at one surface side thereof and a silicon layer at another surface side thereof, wherein the movable portion is displaced under application of a dynamic quantity and the silicon layer is separated from the movable portion by an insulator; and

a circuit chip for communicating with the sensor chip, wherein the circuit chip is disposed to confront the one surface of the sensor chip through a gap portion and to cover the movable portion, and the sensor chip and the circuit chip are bonded to each other around the gap portion so that a bonding portion is formed that substantially surrounds and seals the gap portion, wherein

the gap portion is sealed by sealing the sensor chip, the circuit chip and the gap bonding portion, and the movable portion is disposed within the sealed gap portion,

the sensor chip and the circuit chip are sealingly wrapped by mold material, and

the sensor chip and the circuit chip are sealed by soft material softer than the mold material, and the outside of the soft material is wrapped by the mold material.

2. The dynamic quantity sensor according to claim 1, further comprising a lead frame for transmitting electrical signals to an exterior, wherein the sensor chip is bonded to the lead frame on another surface opposite to the one surface of the sensor chip facing the circuit chip.

3. The dynamic quantity sensor according to claim 1, wherein the sensor chip and the circuit chip are electrically connected to each other by bonding wires.

4. The dynamic quantity sensor of claim 1, wherein the bonding portion comprises a spacer having a predetermined thickness for separating the circuit chip from the movable portion.

5. A dynamic quantity sensor comprising:

a sensor chip including a movable portion at one surface side thereof, wherein the movable portion is displaced under application of a dynamic quantity; and

a circuit chip for communicating with the sensor chip, wherein the circuit chip is disposed so as to confront one surface of the sensor chip through a gap portion and to cover the movable portion, and wherein the sensor chip and the circuit chip are partially bonded to each other around the gap portion, wherein

the movable portion is disposed within a sealed gap that is sealed by sealing the sensor chip and circuit chip,

the sensor chip and the circuit chip are sealingly wrapped by mold material, and

the sensor chip and the circuit chip are sealed by soft material softer than the mold material, and the outside of the soft material is wrapped by the mold material.

6. The dynamic quantity sensor of claim 5, wherein a spacer substantially surrounds the gap portion, wherein the spacer has a predetermined thickness for separating the circuit chip from the movable portion.

7. A dynamic quantity sensor, comprising:

a sensor chip including a movable portion that is displaceable in response to application of a dynamic quantity; and

a circuit chip in communication with the sensor chip and bonded to the sensor chip so as to define a sealed gap therebetween in which the movable portion of the sensor chip is disposed;

a sealant that encapsulates the sensor chip and the circuit chip and that moderates stress caused by temperature variation; and

a mold material having a hardness greater than a hardness of the sealant and that encapsulates the sensor chip, the circuit chip and the sealant.

8. The dynamic quantity sensor of claim 7, further comprising wiring for connecting the circuit chip to the sensor chip, the wiring being substantially encapsulated by the sealant.