Recipe-and-component control module and methods thereof

• US 7,672,747 B2
• Filed: 03/29/2007
• Issued: 03/02/2010
• Est. Priority Date: 03/30/2000
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Lui, Andrew, Huang, Chung-Ho
• Primary Examiner(s): Kasenge; Charles R
• Application Number:
  US11/693,664
• Publication Number:
  US 20080243988A1
• Time in Patent Office: 1,069 Days
• Field of Search: 700/97, 700/100, 700108-110, 700/121, 700/99, 700/104, 700/175, 700/176, 709201-203, 702182-185, 702/35, 702 81- 84, 705/8
• US Class Current: 700/100
• CPC Class Codes: G05B 19/4183 characterised by data acquisition, e.g. workpiece identification
• CPC Class Codes: G05B 2219/32097 Recipe programming for flexible batch
• CPC Class Codes: G05B 2219/33063 Generic coordination, master agent to data manager agent to tasks to active agent
• CPC Class Codes: G05B 2219/33068 CCP coordination cooperation protocol, make optimal decisions with other agents
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A recipe-and component control module (RACCM) is provided. The RACCM is a server for performing data management in a plasma processing system with a plurality of components. The RACCM includes a plurality of intelligent agents. Each intelligent agent of the intelligent agents is configured to interact with each component of the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents.

Claims

1. A plasma processing system comprising a program storage medium, said program storage medium having a plurality of agents embodied therein for performing data management in said plasma processing system, said plasma processing system having or being coupled with a plurality of components, said plasma processing system comprising:

a plurality of intelligent agents, each intelligent agent of said intelligent agents being configured to interact with a component of said plurality of components, said plurality of intelligent agents including at least a first intelligent agent and a second intelligent agent, said plurality of components including at least a first component and a second component, said first intelligent agent being configured to receive first data from said first component according to a first set of criteria, said first component being configured to collect second data according to a second set of criteria, said second intelligent agent being configured to receive third data from said second component according to a third set of criteria, said second component being configured to collect fourth data according to a fourth set of criteria, said first set of criteria being different from said second set of criteria, said first set of criteria being different from said third set of criteria, said third set of criteria being different from said fourth set of criteria, said first data being a subset of said second data, said third data being a subset of said fourth data;

a coordinating agent, said coordinating agent being configured to receive processed data from said plurality of intelligent agents; and

a set of provisional agents, said set of provisional agents being configured to perform recipe management, said recipe management including distributing at least part of a recipe to at least one of said plurality of intelligent agents and said coordinating agent,

wherein said each intelligent agent of said plurality of intelligent agents includes intelligence for defining configuration requirements for said component of said plurality of components, said configuration requirements including criteria for sending a data file to said each intelligent agent of said plurality of intelligent agents, said criteria being based on said part of said recipe being stored locally at said each intelligent anent of said plurality of intelligent agents.

2. The plasma processing system of claim 1 wherein said plurality of components employing said condition requirements to perform pre-processing on said data file prior to sending said data file to said plurality of intelligent agents.

3. The plasma processing system of claim 1 wherein said each intelligent agent of said plurality of intelligent agents includes a cache, said cache being configured to save at least a data file in order to enable data latching.

4. The plasma processing system of claim 1 wherein said each intelligent agent of said plurality of intelligent agents performs data analysis of a data file to generate a signature data, said signature data being summarized data for said data file.

5. The plasma processing system of claim 4 wherein said coordinating agent is configured to receive said signature data from each intelligent agent of said plurality of intelligent agents, said coordinating agent performing data analysis to generate a composite signature.

6. The plasma processing system of claim 5 wherein said coordinating agent includes intelligence for providing instruction to said plurality of components based on said composite signature.

7. The plasma processing system of claim 1 wherein said plurality of components including at least one of a process module, a sensor, and a metrology tool.

8. The plasma processing system of claim 1 wherein said plasma processing system includes intelligence for performing self-discovery to identify changes to said plasma processing system, said self-discovery including identifying when a component of said plurality of components is being connected to said plasma processing system.

9. An article of manufacture comprising a program storage medium having computer readable code embodied therein, said computer readable code being configured to perform data management for a plasma processing system, comprising:

code for providing a server, wherein said server including

a plurality of intelligent agents, each intelligent agent of said intelligent agents being configured to interact with a component of said plurality of components, said plurality of intelligent agents including at least a first intelligent agent and a second intelligent agent, said plurality of components including at least a first component and a second component, said first intelligent agent being configured to receive first data from said first component according to a first set of criteria, said first component being configured to collect second data according to a second set of criteria, said second intelligent agent being configured to receive third data from said second component according to a third set of criteria, said second component being configured to collect fourth data according to a fourth set of criteria, said first set of criteria being different from said second set of criteria, said first set of criteria being different from said third set of criteria, said third set of criteria being different from said fourth set of criteria, said first data being a subset of said second data, said third data being a subset of said fourth data, and

a coordinating agent, said coordinating agent being configured to receive processed data from said plurality of intelligent agents,

wherein said each intelligent agent of said plurality of intelligent agents includes a cache, said cache being configured to include code for saving at least a data file in order to enable data latching.

10. The article of manufacture of claim 9 wherein said server includes a set of provisional agents, said set of provisional agents being configured to include code for performing recipe management, said recipe management including code for distributing at least part of a recipe to at least one of said plurality of intelligent agents and said coordinating agent.

11. The article of manufacture of claim 10 wherein said each intelligent agents of said plurality of intelligent agents includes intelligence for including code for defining configuration requirements for said each components of said plurality of components, said configuration requirements including criteria for sending a data file to said each intelligent agent of said plurality of intelligent agents, said criteria being based on said part of said recipe being stored locally at said each intelligent agent of said plurality of intelligent agents.

12. The article of manufacture of claim 9 wherein said each intelligent agent of said plurality of intelligent agents includes code for performing data analysis of a data file to generate a signature data, said signature data being summarized data for said data file.

13. The article of manufacture of claim 12 wherein said coordinating agent is configured to include code for receiving a signature data from each intelligent agent of said plurality of intelligent agents, said signature data being summarized data for said data file.

14. The article of manufacture of claim 13 wherein said coordinating agent includes intelligence for performing data analysis to generate a composite signature, said coordinating agent including code for employing said signature data to provide instruction to said plurality of components.

15. The article of manufacture of claim 9 wherein said server includes intelligence for performing self-discovery to identify changes to said plasma processing system, said self-discovery including code for identifying when a component of said plurality of components is being connected to said plasma processing system.