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Angular velocity sensor and electronic device

  • US 7,673,512 B2
  • Filed: 10/30/2007
  • Issued: 03/09/2010
  • Est. Priority Date: 10/30/2006
  • Status: Expired due to Fees
First Claim
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1. An angular velocity sensor, comprising:

  • a base portion;

    three arm portions that extend as one piece from the base portion to an approximately same direction;

    a piezoelectric film formed on one surface of each of the arm portions;

    drive electrodes for excitation formed on the piezoelectric films of at least a first arm portion and a second arm portion, said first and second arm portions being positioned on outer sides, among the three arm portions; and

    detection electrodes for angular velocity detection formed on the piezoelectric film of at least a centrally-positioned arm portion, among the three arm portions, wherein;

    among the three arm portions, the two arm portions that are positioned on outer sides are excited in phase with respect to each other, and the centrally-positioned arm portion is excited in opposite phase with respect to the two arm portions that are positioned on outer sides,the drive electrodes excite the arm portions in a first direction vertical to surfaces on which the piezoelectric films are formed, andthe detection electrodes detect a vibration in a second direction parallel to the surfaces on which the piezoelectric films of the arm portions are formed.

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