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Acceleration sensor having single and multi-layer substrates

  • US 7,673,514 B2
  • Filed: 12/14/2007
  • Issued: 03/09/2010
  • Est. Priority Date: 02/16/2005
  • Status: Expired due to Fees
First Claim
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1. An acceleration sensor comprising:

  • a first substrate;

    a second substrate consisting of a first layer that is the closest layer of said second substrate to said first substrate, said first layer having a first region and a second region, and a first surface that is opposed to said first substrate and one or more second layers formed on only the first region of said first layer, on a second surface of said first layer that is opposite said first surface; and

    a sensor portion provided in a sealed cavity portion formed between said first substrate and said second substrate which are opposed to each other,wherein said second layers are formed above said sensor portion.

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