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Protective barriers for small devices

  • US 7,673,679 B2
  • Filed: 09/19/2005
  • Issued: 03/09/2010
  • Est. Priority Date: 09/19/2005
  • Status: Active Grant
First Claim
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1. A downhole fluids analysis system, comprising:

  • a small device adapted for downhole use to measure a property of a flowing fluid in contact with the device, wherein the small device is a micro-machined integrated device out of a substrate material; and

    a protective barrier for protecting the device against the fluid, wherein the protective barrier comprises two or more layers of coating on the device and the protective barrier comprises at least a first layer of tantalum oxide and a second layer of titanium nitride.

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