Sensor device and production method therefor
First Claim
1. A method of producing a sensor device comprising the steps of:
- providing a sensor substrate, which comprises a frame having an opening, a movable portion movably held in said opening, and a detection portion configured to output an electric signal according to a positional displacement of said movable portion, a first package substrate bonded to one of opposite surfaces of said sensor substrate, and a second package substrate bonded to the other surface of said sensor substrate;
forming a first surface-activated region on a surface of said frame facing the first package substrate over an entire circumference of said frame so as to surround said movable portion;
forming a second surface-activated region on a surface of said frame facing the second package substrate over an entire circumference of said frame so as to surround said movable portion;
forming a surface-activated region on each of the first package substrate and the second package substrate; and
forming a direct bonding between said first surface-activated region and said surface-activated region of the first package substrate, and a direct bonding between said second surface-activated region and said surface-activated region of the second package substrate at room temperature.
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Accused Products
Abstract
A compact sensor device having stable sensor characteristics and the production method are provided. The sensor device is formed with a sensor substrate and a pair of package substrates bonded to both surface of the sensor substrate. The sensor substrate has a frame with an opening, a movable portion held in the opening to be movable relative to the frame, and a detecting portion for outputting an electric signal according to a positional displacement of the movable portion. Surface-activated regions are formed on the frame of the sensor substrate and the package substrates by use of an atomic beam, an ion beam or a plasma of an inert gas. By forming a direct bonding between the surface-activated regions of the sensor substrate and each of the package substrates at room temperature, it is possible to avoid inconvenience resulting from residual stress at the bonding portion.
30 Citations
25 Claims
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1. A method of producing a sensor device comprising the steps of:
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providing a sensor substrate, which comprises a frame having an opening, a movable portion movably held in said opening, and a detection portion configured to output an electric signal according to a positional displacement of said movable portion, a first package substrate bonded to one of opposite surfaces of said sensor substrate, and a second package substrate bonded to the other surface of said sensor substrate; forming a first surface-activated region on a surface of said frame facing the first package substrate over an entire circumference of said frame so as to surround said movable portion; forming a second surface-activated region on a surface of said frame facing the second package substrate over an entire circumference of said frame so as to surround said movable portion; forming a surface-activated region on each of the first package substrate and the second package substrate; and forming a direct bonding between said first surface-activated region and said surface-activated region of the first package substrate, and a direct bonding between said second surface-activated region and said surface-activated region of the second package substrate at room temperature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A sensor device comprising:
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a sensor substrate comprising a frame having an opening, a movable portion movably held in said opening, and a detecting portion configured to output an electric signal according to a positional displacement of said movable portion; a first package substrate bonded to one of opposite surfaces of said sensor substrate; a second package substrate bonded to the other surface of said sensor substrate; wherein said frame has a first surface-activated region formed on a surface facing the first package substrate over an entire circumference thereof so as to surround said movable portion, and a second surface-activated region formed on a surface facing the second package substrate over an entire circumference thereof so as to surround said movable portion, the bonding between said sensor substrate and the first package substrate is a solid-phase direct bonding without diffusion between said first surface-activated region and a surface-activated region formed on the first package substrate, and the bonding between said sensor substrate and the second package substrate is a solid-phase direct bonding without diffusion between said second surface-activated region and a surface-activated region formed on the second package substrate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification