Uniform color filter arrays in a moat
First Claim
Patent Images
1. A pixel comprising:
- a photo-conversion device formed within a substrate;
a lens over said photo-conversion device;
a plurality of fabricated layers between said photo-conversion device and lens, the plurality of fabricated layers comprising at least a planarization layer, which extends to other pixels and which supports the lens, and at least one other layer between the planarization layer and the substrate;
a trench having a depth and being formed at a location between said planarization layer and photo-conversion device and in at least the at least one other layer; and
a color filter having a uniform thickness recessed in said trench, the uniform thickness being less than the depth of said trench.
2 Assignments
0 Petitions
Accused Products
Abstract
A method and apparatus for improving the planarity of a recessed color filter array when the recessed region or trench depth exceeds the thickness of the color filter film. The method includes the steps of coating the entire wafer with an additional coating material after applying the CFA, then planarizing that resist layer using CMP and then using a dry etch to transfer that planar surface down as far as required to achieve a planar color filter with a uniform thickness.
-
Citations
29 Claims
-
1. A pixel comprising:
-
a photo-conversion device formed within a substrate; a lens over said photo-conversion device; a plurality of fabricated layers between said photo-conversion device and lens, the plurality of fabricated layers comprising at least a planarization layer, which extends to other pixels and which supports the lens, and at least one other layer between the planarization layer and the substrate; a trench having a depth and being formed at a location between said planarization layer and photo-conversion device and in at least the at least one other layer; and a color filter having a uniform thickness recessed in said trench, the uniform thickness being less than the depth of said trench. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A pixel comprising:
-
a photo-conversion device formed within a substrate; a lens over said photo-conversion device; a plurality of fabricated materials between said photo-conversion device and lens, the plurality of fabricated materials comprising at least a planarization material, which extends to other pixels and which supports the lens, and at least one other material between the planarization material and the substrate; a trench having a depth and being formed in the at least one other material; and a color filter material having a uniform thickness recessed within said trench, the uniform thickness being less than the depth of said trench. - View Dependent Claims (11, 12, 13, 14, 15)
-
-
16. An image sensor comprising:
-
at least one pixel comprising; a photo-conversion device formed within a substrate; a lens over said photo-conversion device; and a plurality of fabricated materials between said photo-conversion device and lens, the plurality of fabricated materials comprising at least a planarization material, which extends to other pixels and which supports the lens, and at least one other material between said planarization material and the substrate; a trench having a depth and being formed in at least the at least one other material between said planarization material and said photo-conversion device; and a color filter material having a uniform thickness recessed within said trench, the uniform thickness being less than the depth of said trench. - View Dependent Claims (17, 18, 19, 20)
-
-
21. An image sensor comprising:
a pixel array comprising; a plurality of photosensors formed within a substrate; a plurality of lenses, each respectively located over a respective photosensor; a plurality of fabricated layers between said plurality of photosensors and said plurality of lenses, the plurality of fabricated layers comprising at least a planarization layer, and at least one other layer; a plurality of trenches of a depth formed in at least the at least one other layer located between a respective lens and a respective photosensor; and a plurality of color filters, each having a uniform thickness less than the depth of said plurality of trenches and being recessed within a respective trench, said plurality of color filters including color filters for different colors. - View Dependent Claims (22, 23, 24, 25)
-
26. A system comprising:
a processor coupled to an image sensor, said image sensor comprising; at least one pixel comprising; a photo-conversion device formed within a substrate; a lens over said photo-conversion device; a plurality of fabricated layers between said photo-conversion device and lens, partially formed in one of said plurality of fabricated layers, the plurality of fabricated layers comprising at least a planarization layer, and at least one other material; a trench having a depth and being formed in at least the at least one other material at a location between said at least one other material and said photo-conversion device; and a color filter having a uniform thickness recessed within said trench, the uniform thickness being less than the depth of said trench. - View Dependent Claims (27, 28, 29)
Specification