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Multi-gate field effect transistor

  • US 7,675,117 B2
  • Filed: 11/14/2006
  • Issued: 03/09/2010
  • Est. Priority Date: 11/14/2006
  • Status: Active Grant
First Claim
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1. A transistor structure comprising:

  • a first semiconductor layer, wherein said first semiconductor layer comprises a first semiconductor, and wherein said first semiconductor layer has a substantially single-crystal crystal structure;

    a first gate stack comprising a first gate dielectric layer and a first gate conductor layer, wherein said first gate dielectric layer comprises a first rare-earth metal, and wherein said first gate dielectric layer has a substantially single-phase crystal structure; and

    a second gate stack comprising a second gate dielectric layer and a second gate conductor layer, wherein said second gate dielectric layer comprises a second rare-earth metal, and wherein said second gate dielectric layer has a substantially single-phase crystal structure;

    wherein said first semiconductor layer interposes said first gate dielectric layer and said second gate dielectric layer, and wherein said first gate dielectric layer interposes said first semiconductor layer and said first gate conductor layer, and further wherein said second gate dielectric layer interposes said first semiconductor layer and said second gate conductor layer.

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