SOI substrate contact with extended silicide area

• US 7,675,121 B2
• Filed: 10/08/2007
• Issued: 03/09/2010
• Est. Priority Date: 10/08/2007
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Levy, Jessica Anne, Dang, Dinh, Slinkman, James Albert, Doan, Thai, Levy, Max Gerald, Norris, Alan Frederick
• Primary Examiner(s): Tran; Tan N
• Application Number:
  US11/868,564
• Publication Number:
  US 20090090970A1
• Time in Patent Office: 883 Days
• Field of Search: 257/377, 257/382, 257/383, 257/384, 257/388, 257/412, 257/413, 257/347, 257/774, 257/E29.156
• US Class Current: 257/377
• CPC Class Codes: H01L 21/28518 the conductive layers comprising silicides H01L21/28537 takes precedence
• CPC Class Codes: H01L 21/743 Making of internal connections, substrate contacts
• CPC Class Codes: H01L 21/84 the substrate being other than a semiconductor body, e.g. being an insulating body
• CPC Class Codes: H01L 27/1203 the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688

Abstract

A low resistance contact structure and method of making the structure. The structure includes a polysilicon contact through an upper silicon layer and buried oxide layer to a lower silicon layer of a silicon-on-insulation substrate. A region of the upper silicon layer surrounds the polysilicon contact and top surface of the polysilicon contact and surrounding region of upper silicon layer are metal silicided providing an extended contact area greater than the area of the top surface of polysilicon contact.

Claims

1. A structure, comprising:

a substrate comprising a buried oxide layer between a single-crystal upper silicon layer and a lower silicon layer;

a contact region and a device region in said upper silicon layer;

a dielectric isolation in said single-crystal upper silicon layer, a top surface of said dielectric isolation is coplanar with a top surface of said single-crystal upper silicon layer, said dielectric isolation extending to said buried oxide layer, said dielectric isolation completely surrounding and in direct contact with an inner perimeter and an outer perimeter of said contact region and completely surrounding and in direct contact with an outer perimeter of said device region;

a doped polysilicon region extending through said single-crystal upper silicon layer in said contact region and extending through said buried oxide layer to said lower silicon layer, regions of said single-crystal upper silicon layer in said contact region remaining between said doped polysilicon region and said dielectric isolation;

a gate dielectric layer between a gate electrode and a portion of said device region;

a source region and a drain region in said device region, said source region and said drain region on opposite sides of said gate electrode;

a first metal silicide layer on a top surface of said contact region, said first metal silicide layer contiguous on said doped polysilicon region and on said regions of said single-crystal upper silicon layer in said contact region remaining between said doped polysilicon region and said dielectric isolation; and

a second metal silicide layer on a top surface of said source region and a third metal silicide layer on a top surface of said drain region.

2. The structure of claim 1, further including:

an enhanced contact region in said lower silicon layer, said enhanced contact region in direct contact with a bottom surface of said doped polysilicon region, said enhanced contact region and said lower silicon layer doped a same dopant type.

3. The structure of claim 2, wherein an interface between said doped polysilicon region and said lower silicon layer has a resistivity of about 0.05 ohm-cm or less.

4. The structure of claim 2, wherein said contact region is in the form of a first ring surrounded by said dielectric isolation and said doped polysilicon region is in the form of a second ring within said first ring.

5. The structure of claim 2 wherein said dielectric isolation is in the form of a first ring and a second ring wherein said first ring surrounding said device region and said second ring surrounding said contact region, said contact region in the form of a third ring between said first and second rings.

6. The structure of claim 2, wherein said same dopant type is P-type.

7. The structure of claim 1, further including:

a top surface of said doped polysilicon region recessed below a top surface of said dielectric isolation.

8. The structure of claim 1, wherein said lower silicon layer, said single-crystal upper silicon layer and said doped polysilicon region are doped a same dopant type.

9. The structure of claim 8, wherein said same dopant type is P-type.

10. The structure of claim 1, wherein a width of said doped polysilicon region measured in a direction parallel to a top surface of said single-crystal upper silicon layer is less than a width of said contact region measured in said direction.

11. The structure of claim 1, wherein a a ratio of a total thickness of said single-crystal upper silicon layer and said buried oxide layer to a width of said doped polysilicon region is equal to or greater than about 3, wherein said total thickness of said single-crystal upper silicon layer and said buried oxide layer measured in a direction perpendicular to said top surface of said single-crystal upper silicon layer, and said width of said doped polysilicon region measured in a direction parallel to said top surface of said single-crystal upper silicon layer.

12. The structure of claim 1, wherein said doped polysilicon region does not physically contact said dielectric isolation.

13. The structure of claim 1, further including:

an enhanced contact region consisting of a doped region of said lower silicon layer, said enhanced contact region in direct contact with a bottom surface of said doped polysilicon region, said enhanced contact region doped a same dopant type as said lower silicon layer, said enhanced contact region having a higher concentration than said lower silicon layer.

14. The structure of claim 1, further including:

a top surface of said doped polysilicon region recessed below a top surface of said single-crystal upper silicon layer in said contact region.

15. The structure of claim 1, further including:

an enhanced contact region in said lower silicon layer, said enhanced contact region in direct contact with a bottom surface of said polysilicon region;

wherein said doped polysilicon region, said enhanced contact region, and said lower silicon layer doped a same dopant type.

16. The structure of claim 15, wherein said same dopant type is P-type.