Mechanical oscillator formed by a network of basic oscillators
First Claim
1. A mechanical oscillator comprising:
- at least two deformable linking beams connected to a stationary substrate at a plurality of anchoring points which are distributed along the deformable linking beams, the deformable linking beams facing each other; and
a plurality of vibrating cells each connected to and disposed between said at least two deformable linking beams, said plurality of vibrating cells being distributed along the deformable linking beams and a length between two of the plurality of anchoring points being greater or equal to a length of a number of cells greater or equal to 1, whereineach of the plurality of vibrating cells includes a deformable beam having a closed contour, said deformable beam being connected to said at least two deformable linking beams at a first pair of parts which are opposite to each other in the deformable beam.
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Accused Products
Abstract
A mechanical oscillator including: at least two deformable linking beams connected to a stationary substrate at a plurality of anchoring points which are distributed along the deformable linking beams, the deformable linking beams facing each other; and a plurality of vibrating cells each connected to and disposed between the at least two deformable linking beams, the plurality of vibrating cells being distributed along the deformable linking beams and a length between two of the plurality of anchoring points being greater or equal to a length of a number of cells greater or equal to 1, wherein each of the plurality of vibrating cells includes a deformable beam having a closed contour, the deformable beam being connected to the at least two deformable linking beams at a first pair of parts which are opposite to each other in the deformable beam.
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Citations
27 Claims
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1. A mechanical oscillator comprising:
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at least two deformable linking beams connected to a stationary substrate at a plurality of anchoring points which are distributed along the deformable linking beams, the deformable linking beams facing each other; and a plurality of vibrating cells each connected to and disposed between said at least two deformable linking beams, said plurality of vibrating cells being distributed along the deformable linking beams and a length between two of the plurality of anchoring points being greater or equal to a length of a number of cells greater or equal to 1, wherein each of the plurality of vibrating cells includes a deformable beam having a closed contour, said deformable beam being connected to said at least two deformable linking beams at a first pair of parts which are opposite to each other in the deformable beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A mechanical oscillator comprising:
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at least two deformable linking beams connected to a stationary substrate at a plurality of anchoring points which are regularly distributed along the deformable linking beams, and at spans in all of the deformable linking beams, the deformable linking beams being parallel to each other; a plurality of vibrating cells each connected to and disposed between said at least two deformable linking beams, said plurality of vibrating cells being regularly distributed along the deformable linking beams with a pitch, a ratio between said spans and said pitch being an integer greater than or equal to 1, wherein the plurality of vibrating cells include a deformable beam having a closed contour, said deformable beam being connected to each of the deformable linking beams at a first pair of parts which are opposite to each other in the deformable beam having the closed contour, and the plurality of vibrating cells being interconnected between the deformable linking beams. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A mechanical oscillator comprising:
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at least two deformable linking beams connected to a stationary substrate at a plurality of anchoring points which are regularly distributed along the deformable linking beams, and at equal spans in all of the deformable linking beams, the linking beams being parallel to each other; and a plurality of vibrating cells each connected to and disposed between said at least two deformable linking beams, said plurality of vibrating cells being regularly distributed along the deformable linking beams with a constant pitch, a ratio between said spans and said pitch being an integer greater than 1, wherein the plurality of vibrating cells includes a deformable beam having a closed contour, said deformable beam being connected to each of the deformable linking beams at a first pair of parts which are opposite to each other in the deformable beam, a pair of masses rigidly connected to the deformable beam at a second pair of parts which are opposite to each other, and the plurality of vibrating cells being connected to adjacent cells along the deformable linking beams at a third pair of parts which are opposite to each other and each extend at a middle distance between said first pair of parts. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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Specification