Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
First Claim
Patent Images
1. An acoustic galvanic isolator, comprising:
- a carrier signal source;
a modulator connected to receive an information signal and the carrier signal;
a demodulator; and
connected between the modulator and the demodulator, an electrically-isolating acoustic coupler comprising exactly one decoupled stacked bulk acoustic resonator (DSBAR),wherein the DSBAR comprises a first film bulk acoustic resonator (FBAR), a second FBAR, and an electrically-insulating acoustic decoupler between the FBARs, andwherein the electrically-insulating acoustic decoupler comprises at least one of;
(1) an electrically-insulating acoustic Bragg structure;
(2) a quarter-wave thick layer of acoustic coupling material; and
(3) at least one layer of crosslinked polyphenylene polymer.
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Abstract
Embodiments of the acoustic galvanic isolator comprise a carrier signal source, a modulator connected to receive an information signal and the carrier signal, a demodulator, and an electrically-isolating acoustic coupler connected between the modulator and the demodulator. The acoustic coupler comprises no more than one decoupled stacked bulk acoustic resonator (DSBAR). An electrically-isolating acoustic coupler based on a single DSBAR is physically small and is inexpensive to fabricate yet is capable of passing information signals having data rates in excess of 100 Mbit/s and has a substantial breakdown voltage between its inputs and its outputs.
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Citations
20 Claims
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1. An acoustic galvanic isolator, comprising:
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a carrier signal source; a modulator connected to receive an information signal and the carrier signal; a demodulator; and connected between the modulator and the demodulator, an electrically-isolating acoustic coupler comprising exactly one decoupled stacked bulk acoustic resonator (DSBAR), wherein the DSBAR comprises a first film bulk acoustic resonator (FBAR), a second FBAR, and an electrically-insulating acoustic decoupler between the FBARs, and wherein the electrically-insulating acoustic decoupler comprises at least one of;
(1) an electrically-insulating acoustic Bragg structure;
(2) a quarter-wave thick layer of acoustic coupling material; and
(3) at least one layer of crosslinked polyphenylene polymer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for galvanically isolating an information signal, the method comprising:
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providing an electrically-isolating acoustic coupler comprising exactly one decoupled stacked bulk acoustic resonator (DSBAR), the DSBAR comprising a first film bulk acoustic resonator (FBAR), a second FBAR, and an electrically-insulating acoustic decoupler between the FBARs, wherein the electrically-insulating acoustic decoupler comprises at least one of;
(1) an electrically-insulating acoustic Bragg structure;
(2) a quarter-wave thick layer of acoustic coupling material; and
(3) at least one layer of crosslinked polyphenylene polymer;providing a carrier signal; modulating the carrier signal with the information signal to form a modulated electrical signal; acoustically coupling the modulated electrical signal through the electrically-isolating acoustic coupler; and recovering the information signal from the modulated electrical signal acoustically coupled through the electrically-isolating acoustic coupler. - View Dependent Claims (10, 11, 12, 13, 14)
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15. An acoustic galvanic isolator, comprising:
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a semiconductor substrate having an insulating layer formed on a top surface thereof; a carrier signal source disposed on the substrate; a modulator disposed on the substrate and connected to receive an information signal and the carrier signal and to modulate the information signal onto the carrier signal to produce a modulated signal; a demodulator disposed on the substrate; and an electrically-isolating acoustic coupler disposed on the substrate and connected between the modulator and the demodulator, the electrically-isolating acoustic coupler comprising exactly one decoupled stacked bulk acoustic resonator (DSBAR), wherein the demodulator is adapted to receive the modulated signal from the electrically-isolating acoustic coupler and in response thereto outputs the information signal. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification